Non-contact electro-optical displacement follower

Abstract

This invention relates to a non-contact electro-optical displacement follower which captures the image of a target or device under test optically, converts the said image into an electron image by optical-electrical conversion, and measures displacement. It forms a variable voltage which moves the electron image on the displayer to the desired location and can be applied to each deflection coil (8, 9) by arranging a variable voltage generator (18h, 18v) attached to each deflection coil so that the set-up and adjustment of the equipment and measurement preparations can be performed easily. Moreover, this equipment possesses a displayer (A1, A2, A3, A4) to indicate which position (up, down, right or left) the electron image moved due to the variable voltage, in spite of the fact that the electron image may be damaged temporarily if adjustment is excessive. Additionally, a non-contact electro-optical displacement follower of this invention can be equipped with a Light Servo circuit (27, 28) whose frequency response will eliminate effectively any optical noise changing in high speed. It also comes equipped with operation instructions to advise operators directions for each mode the equipment is in, as well as the mode to follow (KD, CPU, I).

What is claimed is: 
     
       1. A non-contact electro-optical displacement follower which captures an image of a device under test optically by converting a pertinent optical image into an electron image through an optical-electrical converter and measures its displacement with a displacement follower which is characterized by possesssing an image dissector tube equipped with a horizontal deflection coil and/or a vertical deflection coil, and a variable voltage generator for horizontal deflection and/or a variable voltage generator for vertical deflection to selectively provide necessary deflection current to make the electron image optionally move to an appropriate place for adjustment or displacement measurement; said variable voltage generator for horizontal deflection and/or said variable voltage generator for vertical deflection being variable voltage generators for enlarging the measured field of view and each possessing an operation processing unit which decides the state of a target by receiving a signal displaying the state of said target within an enlarged field of view and a signal displaying a measuring mode set in advance and alarm equipment generating an alarm depending on the matching between deflection direction of a target or a set-up mode and the state of a target in accordance with said operation processing unit. 
     
     
       2. The non-contact electro-optical displacement follower as described in claim 1, characterized in that said alarm equipment is a visible alarm equipment. 
     
     
       3. The non-contact electro-optical displacement follower as described in claim 1, characterized in that said alarm equipment is a sound alarm equipment. 
     
     
       4. The non-contact electro-optical displacement follower as described in claim 1, characterized in that said operation instruction means gives instructions through a display which can auditorily perceive the system setting, construction, adjustment and operation in an appropriate order. 
     
     
       5. The non-contact electro-optical displacement follower as described in claim 1 characterized by having a light servo circuit that applies a high voltage generated by a high voltage power supply to said image dissector tube, the frequency response of said light servo circuit being higher than the commercial frequency. 
     
     
       6. The non-contact electro-optical displacement follower as described in claim 5, characterized by consisting of a switching regulator whose high voltage power source possesses a frequency response higher than the commercial frequency. 
     
     
       7. The non-contact electro-optical displacement follower as described in claim 1, characterized by possessing an instruction system to control each operation required by the system at any point over an entire system as well as the displacement mode. 
     
     
       8. The non-contact electro-optical displacement follower as described in claim 7, characterized in that said instruction means gives instructions through a display which can visually perceive a system setting, construction, adjustment, and operation in the appropriate order.