Apparatus with field effect transistor having reduced channel length

Abstract

Apparatus is provided with at least a FET. The FET is formed of a first semiconductor layer formed on a substrate, a second semiconductor layer formed on the first semiconductor layer, a insulating layer extending on the side surface of the second semiconductor layer and a conductive layer extending on the insulating layer in opposing relation to the side surface of the second semiconductor layer. In this case, the first, second and third semiconductor layers are formed of a non-single crystal semiconductor doped with a dangling bond neutralizer. The first and third semiconductor layers have the same conductivity type. The second semiconductor layer has a higher resistivity than the first and third semiconductor layers. The first and third semiconductor layers serve as either one of the drain and source and the other of them, respectively. The second semiconductor layer serves as channel region. The insulating layer and the conductive layer serve as gate insulating layer and gate electrode, respectively.

What is claimed is: 
     
       1. Apparatus with a liquid crystal element comprising: a non-single-crystal semiconductor element formed of a first substrate, having a predetermined pattern and consisting of at least (a) a first non-single-crystal semiconductor layer having an I conductivity type and (b) a second non-single-crystal semiconductor layer in substantially the same pattern as the latter and having an N or P conductivity type;   an insulating layer formed above the first substrate to cover the non-single-crystal semiconductor element and having a substantially flat top surface;   a first conductive layer formed on the insulating layer and coupled with the non-single-crystal semiconductor element;   a second conductive layer confronting substantially parallel to the first conductive layer; and   a liquid crystal filled between the first and second conductive layer;   wherein the liquid crystal element consists of at least the first and second conductive layers and the liquid crystal.   
     
     
       2. The apparatus with a liquid crystal element according to claim 1, wherein the second conductive layer is transparent. 
     
     
       3. The apparatus with a liquid crystal element according to claim 1, wherein the second conductive layer is formed on the underside of a second substrate. 
     
     
       4. The apparatus with a liquid crystal element according to claim 3, the second conductive layer and the second substrate are transparent. 
     
     
       5. Apparatus with liquid crystal elements, comprising: a plurality of non-single-crystal semiconductor elements formed on a first substrate, each having a predetermined pattern and consisting of at least (a) a first non-single-crystal semiconductor type having an I conductivity type and (b) a second non-single-crystal semiconductor layer formed on the first non-single-crystal semiconductor layer in substantially the same pattern as the latter and having an N or P conductivity type;   an insulating layer formed above the first substrate to cover each of the non-single-crystal semiconductor elements and having a substantially flat top surface;   a plurality of first conductive layers formed on the insulating layer and coupled with the non-single-crystal semiconductor elements, respectively;   a second conductive layer opposing substantially parallel to the first conductive layers; and   a liquid crystal filled between the first conductive layers and second conductive layer;   wherein each of the liquid crystal elements consists of at least the first conductive layer, that portion of the second conductive layer confronting the first conductive layer and that portion of the liquid crystal between the first conductive layer and the portion of the second conductive layer.   
     
     
       6. The apparatus with liquid crystal elements according to claim 5, wherein the second conductive layer is transparent. 
     
     
       7. The apparatus with liquid crystal elements according to claim 5, wherein the second conductive layer is formed on the underside of a second substrate. 
     
     
       8. The apparatus with liquid crystal elements according to claim 7, the second conductive layer and the second substrate are transparent.