Gas laser device

Abstract

A gas laser device in which a laser medium gas is circulated in an airtight container and a laser beam is generated from the gas excited by an electric discharge, includes a main unit (10) including an air blower (13) for circulating the gas, heat exchangers (12a, 12b) for cooling the gas, and a discharging power supply (11). A laser beam emitter (20) includes a discharging unit (23) and resonator reflecting mirrors (21a, 21b). The main unit (10) and the laser beam emitter (20) are separate and spaced from each other. The main unit (10) and the laser beam emitter (20) are interconnected by a gas pipe assembly having a plurality of highly rigid steel pipes and flexible, expandable/contractable, airtight connector members (31a, 31b) connecting the steel pipes.

I claim: 
     
       1. A gas laser device having a laser medium gas circulated in an airtight container and a laser beam generated from the gas excited by an electric discharge, comprising: a main unit including an air blower for circulating the gas and a discharging power supply;   a laser beam emitter including a discharging unit and resonator reflecting mirrors and being spaced from the main unit; and   a telescopic gas pipe assembly coupling said main unit and said laser beam emitter, said gas pipe assembly including a plurality of highly rigid steel pipes and a plurality of flexible, expandable/contractable, airtight connector members for interconnecting the steel pipes.   
     
     
       2. A gas laser device according to claim 1, wherein said connector members are bellows. 
     
     
       3. A gas laser device according to claim 1, further comprising a robot having an arm, said laser beam emitter being mounted on a distal end of the arm of the robot, and said gas pipe assembly being mounted on the arm of the robot. 
     
     
       4. A gas laser device according to claim 1, further comprising a robot having an arm, said laser beam emitter being mounted on a distal end of the arm of the robot, and the arm of the robot comprises said gas pipe assembly. 
     
     
       5. A gas laser device according to claim 1, wherein said laser beam emitter is a lateral excitation type laser beam emitter. 
     
     
       6. A gas laser device according to claim 1, wherein said gas pipe assembly includes a heat exchanger disposed around the pipes of the gas pipe assembly and having a cooling medium. 
     
     
       7. A gas laser device according to claim 6, wherein said cooling medium is water. 
     
     
       8. A gas laser device according to claim 7, wherein said heat exchanger comprises a water passage, a heat exchanger core within the water passage, and a gas passage within the heat exchanger core. 
     
     
       9. A gas laser device according to claim 8, wherein the communicating means comprises an interior passageway passing through the robot and robot arm, and rotary seals provided at movable portions of the robot and robot arms. 
     
     
       10. A gas laser device having a laser medium gas and a laser being generated from the gas excited by an electric discharge, comprising: a main unit including an air blower for circulating the gas and a discharging power supply;   a laser beam emitter including a discharging unit and resonator reflecting mirrors and being spaced from the main unit; and   a robot having an arm, the laser beam emitter being mounted on a distal end of the robot arm, the robot and robot arm providing means for communicating the laser medium gas from the main unit to the laser beam emitter.