Method of making a flexible membrane circuit tester

Abstract

A pattern of electrodes, with electrical lead lines to the electrodes, arearried by a thin-film membrane mounted on a frame. The pattern corresponds to a test point pattern on a circuit to be tested. The lead lines go to edge connectors on the frame. In order to test a circuit, the membrane is pushed against the test points by air pressure, such that capacitive coupling occurs between the electrodes and the test points.

We claim: 
     
       1. A method of making a flexible membrane tester for a planar electrical circuit including the steps of: preparing a frame to hold said membrane;   affixing a relatively thin flexible membrane to said frame;   depositing a removable layer on one side of said membrane;   forming a plurality of perforations through said membrane extending to said removable layer;   depositing a plurality of combination electrode and lead lines on the side of the membrane opposite to said removable layer such that each combination includes an electrode portion at the bottom of each perforation and in planar contact with said removable layer and a lead line portion extending through said membrane and in contact with said electrode and further extending to another region on said membrane;   removing said removable layer;   and forming a high-dielectric layer on the side of each electrode that was previously in contact with the removable layer.