Powder agitator

Abstract

A powder agitator used for an ion implantation device or an ionized beam deposition device capable of exhibiting satisfactory powder agitating characteristics and minimizing positive charging on powders. The powder agitator includes a base, a vessel for receiving powders therein, a plurality of supports for supporting the vessel on the base, and a pair of piezoelectric elements arranged on the supports and functioning as a vibration generating section. Application of a voltage to the piezoelectric elements causes the vessel to be oscillated in a direction of rotation of the vessel and a speed of oscillation of the vessel to be varied depending on a direction of oscillation of the vessel, resulting in agitating the powders in the vessel.

What is claimed is: 
     
       1. A powder agitator in combination with an ion implantation device or an ionized beam deposition device, comprising: a vessel for receiving powders therein; and   a drive section coupled to said vessel for vertically moving said vessel while rotating said vessel and keeping said vessel horizontal;   said drive section carrying out rotation of said vessel while alternating a direction of rotation of said vessel and varying a rotational speed of said vessel depending on the direction of rotation of said vessel.   
     
     
       2. A powder agitator as defined in claim 1, wherein said vessel is provided on a bottom thereof with a a plurality of fins. 
     
     
       3. A powder agitator in combination with an ion implantation device for implanting powders with an additive at least partially ionized in a vacuum or an ionized beam deposition device for coating powders with an additive at least partially ionized in a vacuum, comprising: a base arranged in one of said devices;   a vessel for receiving said powders therein;   a plurality of elastically deformable supports for supporting said vessel on said base; and   a vibration generating section arranged on said supports for oscillating said supports to vertically move while rotating said vessel, said vibration generating alternating a direction of rotation of said vessel and varying a rotational speed of said vessel depending on the direction of rotation of said vessel as well as keeping said vessel horizontal.   
     
     
       4. A powder agitator as defined in claim 3, wherein said vessel is provided on a bottom thereof with a plurality of fins.