Static megasonic cleaning system for cleaning objects

Abstract

A static megasonic cleaning system for cleaning multiple objects having an exterior surface includes a cassetteless vessel having an internal cavity for receiving the multiple objects and an array of megasonic transducers mounted on the vessel. Each transducer emits a focused beam of megasonic energy into the cavity and is arranged so that the emitted beams from all of the transducers collectively envelop the entire exterior surface of the objects. The transducers are staggered to avoid internal mounting structure within the vessel and avoid unnecessary dissipation of the megasonic energy.

We claim: 
     
       1. A static megasonic cleaning system for cleaning a plurality of objects having an exterior surface and a major plane, said system comprising: (a) a cassetteless vessel having an internal cavity for receiving the plurality of objects and for receiving a fluid, said internal cavity being defined by an internal surface; and   (b) an array of megasonic transducers mounted on said vessel outwardly of said internal surface, each transducer emitting a focused beam of megasonic energy into said cavity, the plurality of transducers being arranged so that the emitted beams extend generally parallel to the major plane of the objects and collectively envelop the entire exterior surface of each object.   
     
     
       2. The cleaning system as recited in claim 1 wherein said internal surface is constructed of a material which is chemically inert with respect to said fluid. 
     
     
       3. The cleaning system as recited in claim 2 wherein said material is at least partially constructed of TEFLON®. 
     
     
       4. The cleaning system as recited in claim 1 wherein said transducers are mounted on said vessel in an opposing manner. 
     
     
       5. A static megasonic cleaning system for cleaning a plurality of objects having an exterior surface and a major plane, said system comprising: (a) a cassetteless vessel having an internal cavity for receiving the plurality objects and for receiving a plurality of different fluids, said internal cavity being defined by an internal surface; and   (b) an array of megasonic transducers mounted on said vessel outwardly of said internal surface, each transducer emitting a focused beam of megasonic energy into said cavity, the plurality of transducers being arranged so that the emitted beams extend generally parallel to the major plane of the objects and collectively envelop the entire exterior surface of each object.   
     
     
       6. The cleaning system as recited in claim 5 wherein said internal surface is constructed of a material which is chemically inert with respect to each of said fluids. 
     
     
       7. The cleaning system as recited in claim 6 wherein said material is at least partially constructed of TEFLON®. 
     
     
       8. The cleaning system as recited in claim 5 wherein said transducers are mounted on said vessel in an opposing manner. 
     
     
       9. A static megasonic cleaning system for cleaning objects having a major plane, said system comprising: (a) a cassetteless vessel having an internal cavity for receiving the objects and for receiving a fluid, said internal cavity being defined by an internal surface, said vessel including at least two mounting members extending inwardly from and directly mounted on said internal surface for engaging and supporting the objects within the cavity, said mounting members being spaced with respect to each other; and   (b) an array of megasonic transducers mounted on said vessel outwardly of said internal surface, each transducer emitting a focused beam of megasonic energy into said cavity generally parallel to the major plane of the objects, each transducer being mounted on said vessel such that each focused beam of megasonic energy passes directly from said internal surface to said objects without impacting upon said mounting members.   
     
     
       10. The cleaning system as recited in claim 9 wherein the array of transducers includes a plurality of transducers arranged so that the emitted beams collectively envelop the objects. 
     
     
       11. The cleaning system as recited in claim 9 wherein said vessel includes a longitudinal axis, said mounting members being spaced from each other along said longitudinal axis. 
     
     
       12. A static megasonic cleaning system for cleaning objects having a major plane, said system comprising: (a) a cassetteless vessel having a first end, a second end and four interconnected walls extending between said first and second ends, each of said walls having an internal surface, said internal surfaces defining an internal cavity for receiving the objects and a cleaning fluid;   (b) a first mounting member extending inwardly from and directly mounted on said internal surface of one of said walls for engaging and supporting the objects within the cavity;   (c) a second mounting member extending inwardly from and directly mounted on said internal surface of a second of said walls for engaging and supporting the objects within the cavity in combination with said first mounting member;   (d) a first array of transducers mounted on said one of said walls outwardly of said internal surface thereof, each transducer of said first array emitting a focused beam of megasonic energy into said cavity generally parallel to the major plane of the objects and being mounted on said one of said walls such that the focused beam of energy passes directly from said internal surface of said one of said walls to said objects without impacting upon said first mounting member; and   (e) a second array of transducers mounted on said second of said walls outwardly of said internal surface thereof, each transducer of said second array emitting a focused beam of megasonic energy into said cavity generally parallel to the major plane of the objects and being mounted on said second of said walls such that the focused beam of energy passes directly from said internal surface of said second of said walls to said objects without impacting upon said second mounting member.   
     
     
       13. The cleaning system as recited in claim 12 wherein the first and second array of transducers are arranged such that the emitted beams of megasonic energy collectively envelop the objects. 
     
     
       14. The cleaning system as recited in claim 12 wherein said first array of transducers is staggered with respect to said second array of transducers such that the emitted beams of said first and second array of transducers extend generally parallel with respect to each other. 
     
     
       15. The cleaning system as recited in claim 12 wherein said second of said walls is oppositely disposed from said one of said walls.