Clean space system

Abstract

A clean space system prevents pollution of clean surroundings in a processing space. Pollution is avoided which could otherwise occur when a worker comes in contact with the processing space while carrying out processes and operations in the clean surroundings. The apparatus includes a clean processing space, in which the processes and operations are carried out, and a preparing space coupled with an opening for work in the processing space. The preparing space is used by the worker prior to entering the processing space. In the preparing space, the worker performs preliminary actions such as changing his clothes and cleaning himself using an air shower to remove particles from his body.

What is claimed are: 
     
       1. A clean space system for use by a worker, comprising: a first structure including a first structure space and an air shower for cleaning said worker, said first structure including a first structure portion with a first structure opening;   a second structure physically separate from said first structure, said second structure including a second structure portion which includes a second structure wall forming a second structure opening, and a clean space which is free from pollution particles;   a movable third structure for coupling with and decoupling from said first structure portion and said second structure portion, said third structure including a third structure space maintained as a further clean space in which said worker waits and a third structure wall having a third structure opening and expandable ring means for containing air, said ring means disposed between said second structure wall and said third structure wall for sealing and coupling said second and third structures,   wherein the worker moves from the first structure space to the third structure space, to said second structure.