US5690530AExpiredUtility

Multilayer pillar structure for improved field emission devices

81
Assignee: LUCENT TECHNOLOGIES INCPriority: Jan 31, 1995Filed: Oct 8, 1996Granted: Nov 25, 1997
Est. expiryJan 31, 2015(expired)· nominal 20-yr term from priority
H01J 29/028H01J 9/185H01J 31/123H01J 2329/8625H01J 2329/863H01J 2329/8635H01J 2329/864
81
PatentIndex Score
30
Cited by
26
References
3
Claims

Abstract

In accordance with the invention, a field emission device is provided with an improved pillar structure comprising multi-layer pillars. The pillars have a geometric structure that traps most secondary electrons and an exposed surface that reduces the number of secondary electrons. Processing and assembly methods permit low-cost manufacturing of high breakdown-voltage devices, including flat panel displays.

Claims

exact text as granted — not AI-modified
We claim: 
     
       1. A method for making a field emission device comprising an emitter cathode electrode, an anode electrode and a plurality of insulating pillars separating said electrodes, comprising the steps of: providing a multilayer pillar precursor comprising alternating layers of conducting and insulating material;   cutting or etching pillar preforms from said precursor;   forming grooves in said pillar preforms; and   adhering said pillars on one of said electrodes.   
     
     
       2. The method of claim 1 wherein said grooves are formed by selectively removing insulating material. 
     
     
       3. The method of claim 1 wherein said pillars are adhered to said emitter cathode electrode.

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