US5690530AExpiredUtility
Multilayer pillar structure for improved field emission devices
Est. expiryJan 31, 2015(expired)· nominal 20-yr term from priority
H01J 29/028H01J 9/185H01J 31/123H01J 2329/8625H01J 2329/863H01J 2329/8635H01J 2329/864
81
PatentIndex Score
30
Cited by
26
References
3
Claims
Abstract
In accordance with the invention, a field emission device is provided with an improved pillar structure comprising multi-layer pillars. The pillars have a geometric structure that traps most secondary electrons and an exposed surface that reduces the number of secondary electrons. Processing and assembly methods permit low-cost manufacturing of high breakdown-voltage devices, including flat panel displays.
Claims
exact text as granted — not AI-modifiedWe claim:
1. A method for making a field emission device comprising an emitter cathode electrode, an anode electrode and a plurality of insulating pillars separating said electrodes, comprising the steps of: providing a multilayer pillar precursor comprising alternating layers of conducting and insulating material; cutting or etching pillar preforms from said precursor; forming grooves in said pillar preforms; and adhering said pillars on one of said electrodes.
2. The method of claim 1 wherein said grooves are formed by selectively removing insulating material.
3. The method of claim 1 wherein said pillars are adhered to said emitter cathode electrode.Cited by (0)
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