Method of orientation treatment of orientation film and apparatus of orientation treatment of orientation film

Abstract

In a method and an apparatus of orientation treatment of an orientation film according to the present invention, the surface of a orientation film formed on a substrate for orientating liquid-crystal molecules is rubbed in a predetermined direction. Thereafter ion beams are radiated onto the orientation film in a vacuum in a direction different from the rubbing direction, that is, in the direction obliquely above the orientation film surface. In the method, these steps can be reversed.

What is claimed is: 
     
       1. A method of orientation treatment of an orientation film of a high molecular weight organic material formed on a substrate for orientating liquid-crystal molecules, comprising the steps of: rubbing a surface of said orientation film; and   radiating ion beams onto the rubbed surface of said orientation film in a vacuum from a direction substantially perpendicular to the surface of said orientation film.   
     
     
       2. A method according to claim 1, further comprising the step of: simultaneously to said radiating step, supplying electrons to said orientation film to neutralize positive charges given by said radiating step. 
     
     
       3. A method of orientation treatment of an orientation film of a high molecular weight organic material formed on a substrate for orientating liquid-crystal molecules, comprising the steps of: radiating ion beams onto said orientation film in a vacuum from a direction substantially perpendicular to the surface of said orientation film; and   rubbing a surface of the irradiated orientation film.   
     
     
       4. A method according to claim 3, further comprising the step of: simultaneously to said radiating step, supplying electrons to said orientation film to neutralize positive charges given by said radiating step. 
     
     
       5. An apparatus for orientation treatment of a high molecular weight organic material orientation film formed on a substrate for orientating liquid-crystal molecules, comprising in combination: rubbing means for rubbing a surface of said orientation film; and   radiating means for radiating ion beams onto said orientation film in a vacuum   wherein said rubbing means rubs the surface of said orientation film in a predetermined direction, and said radiating means radiates said ion beams onto said orientation film from a direction different from the direction of the rubbing by said rubbing means and from a direction substantially perpendicular to the surface of said orientation film.   
     
     
       6. An apparatus according to claim 5, further comprising electron supplying means for supplying electrons to said orientation film to neutralize positive charges given by said radiating means.