Exhaust gas treating agent and a method of treating exhaust gas using the agent

Abstract

There is provided with a method of treating an exhaust gas comprising the steps of loading into a column an exhaust gas treating agent containing as a main component a metal of which surface is fluorinated previously; passing through the column the exhaust gas containing nitrogen trifluoride as a component to be treated; and contacting the exhaust gas with the exhaust gas treating agent. And the exhaust gas treating agent is also provided.

What is claimed is: 
     
       1. An exhaust gas treating agent for treating an exhaust gas containing nitrogen trifluoride comprising as a main component particles consisting essentially of a metal having a fluorinated surface which decomposes said nitrogen trifluoride, wherein the fluorinated surface is provided by fluorine incorporated into a surface of the metal at a rate of fluorination of 0.1% to 5% by weight, by a fluorination process carried out at about room temperature.   
     
     
       2. An exhaust gas treating agent as claimed in claim 1, wherein a specific surface area of the fluorinated metal is 0.1 m 2  /g or larger. 
     
     
       3. An exhaust gas treating agent as claimed in claim 2, wherein the agent has a fluorine content of 0.1% by weight or higher relative to the metal. 
     
     
       4. An exhaust gas treating agent as claimed in claim 1, wherein the agent has a fluorine content of 0.1% by weight or higher relative to the metal. 
     
     
       5. An exhaust gas treating agent as claimed in any one of claims 1 through 3, wherein the metal is selected from the group consisting of iron, copper, zinc, aluminum, manganese, alloys containing as effective components these metals, and a mixture thereof. 
     
     
       6. An exhaust gas treating agent as claimed in claim 5, wherein the metal is iron and the agent contains from 1% to 30% by weight of chromium relative to the iron, the chromium being substantially uniformly mixed with the iron. 
     
     
       7. The exhaust gas treating agent of claim 1, wherein the fluorination process is carried out at about 20°-30° C. 
     
     
       8. The exhaust gas treating agent of claim 1, wherein the fluorination process comprises the step of contacting the metal with a gaseous fluorinating agent. 
     
     
       9. The exhaust gas treating agent of claim 8, wherein the gaseous fluorinating agent is F 2 , NF 3 , or HF.