Method for making glass pressure capacitance transducers in batch

Abstract

The present provides a method for making glass pressure sensors in batch. First glass plates of appropriate dimensions are scribed. Then electrodes are sputters onto each of the plates, followed by screen printing a frit layer and crossover tabs. The plates are then preglazed and bonded together to form a plurality of sensors. The plates are then scribed and broken along the scribes to form individual sensors.

What is claimed is: 
     
       1. A method for making glass pressure capacitance transducers in batch, comprising the steps of: (a) scribing first and second plates of uncoated glass;   (b) cleaning said first and second plates;   (c) fixing to a first side of said first plate a first aperture mask having an electrode pattern;   (d) fixing to a first side of said second plate a second aperture mask having said electrode pattern;   (e) sputtering said electrode pattern onto said first sides of said first and second plates;   (f) removing said first and second aperture masks;   (g) screen printing glass frit on to said first side of said first plate;   (h) screen printing crossover tabs on an edge of said first side of said second plate;   (i) preglazing said first and second plates;   (j) fixing said first and second plates together so said respective first sides contact;   (k) sealing and bonding said first and second plates together to form a plurality of sensors wherein said cross-over tabs form an electrically conductive path between said electrode patterns on said first and second plates; and   (l) scribing and breaking said bonded plates along said scribes to form multiple sensors.   
     
     
       2. The method of claim 1 further comprising the steps of: fixing to a second side of said first plate a third aperture mask having a ground shield pattern;   fixing to a second side of said second plate a fourth aperture mask having said ground shield pattern;   sputtering said ground shield pattern onto said second sides of said first and second plates; and   removing said third and fourth aperture masks.   
     
     
       3. The method of claim 2 wherein said sputtering of said electrode pattern and said ground shield pattern include a pre-sputtering etching step. 
     
     
       4. The method of claim 1 wherein said cleaning step includes ultrasonic cleaning, scrubbing and ozone cleaning. 
     
     
       5. The method of claim 1 further including after step (g) the step of letting said glass frit settle. 
     
     
       6. The method of claim 5 further including after said settling the steps of drying and hand lapping said glass frit. 
     
     
       7. The method of claim 1 further including after step (f) the step of sputtering onto one of said first sides a silicon dioxide insulator. 
     
     
       8. The method of claim 8 further including after step (l) the step of mounting an individual sensor on a housing base. 
     
     
       9. The method of claim 1 wherein step (k) includes the step of heating said plates in a vacuum. 
     
     
       10. The method of claim 1 further including after step (k) the step of running said plurality of sensors through a pressure cycle test.