Vibrational processing apparatus and method

Abstract

In a plating apparatus 10, a known control signal for detection is supplied from a computer 50 to a motor 13 in advance; the motor 13 is rotated at a variable speed within a predetermined range; and the displacement of a basket 18 is detected by a displacement sensor 30 to obtain displacement characteristics data. Next, the computer 50 controls the rotating operation of the motor 13 through a motor controller 60 to put the basket 18 in a desired optimum state of vibration using the obtained displacement characteristics data and data of an optimum amplitude for the plating process obtained in advance.

What is claimed is: 
     
       1. A method of vibrational processing using vibrational processing apparatus including a vibration generating unit for generating predetermined vibration, a vibratable element connected to said vibration generating unit for containing an object to be processed and for applying vibration to said object to be processed, a displacement detecting unit for detecting vibrational displacement of said vibratable element, and a first control unit for outputting a control signal to said vibrational generating unit, the method comprising the steps of: a) causing said control unit to output a control signal to said vibration generating unit prior to a plating process to subject said vibratable element to vibration;   b) detecting displacement of said vibratable element to obtain displacement characteristics thereof;   c) determining the optimum amplitude of vibration to be applied to said vibratable element from said displacement characteristics; and   d) applying a second control signal from said control unit to said vibration generating unit in accordance with the optimum amplitude determined in step c).   
     
     
       2. A method of vibrational processing using vibrational processing apparatus including a vibration generating unit for generating predetermined vibration, a vibratable element connected to said vibration generating unit for containing an object to be processed and for applying vibration to said object to be processed, a displacement detecting unit for detecting vibrational displacement of said vibratable element, and a first control unit for outputting a control signal to said vibrational generating unit, the method comprising the steps of: a) causing said control unit to output a control signal to said vibration generating unit prior to a polishing process to subject said vibratable element to vibration;   b) detecting displacement of said vibratable element to obtain displacement characteristics thereof;   c) determining the optimum amplitude of vibration to be applied to said vibratable element from said displacement characteristics; and   d) applying a second control signal from said control unit to said vibration generating unit in accordance with the optimum amplitude determined in step c).