Fluorescent x-ray spectroscopes

Abstract

A fluorescent x-ray spectrometer, which can be used selectably both as a wavelength-dispersion type and an energy-dispersion type, includes an irradiation chamber and a detection chamber provided with both a first detector and a second detector respectively for detecting wavelength-type and energy-type dispersion. A sample disposed in the irradiation chamber is exposed to excitation x-ray and generates fluorescent x-ray which is introduced into the detection chamber along an incident optical path defined by a Soller slit and is made incident on a dispersing element. For detecting wavelength-type dispersion, dispersed x-ray is received by the first detector. For detecting energy-type dispersion, the dispersing element is retracted from the incident optical path such that the incident x-ray from the irradiation chamber is directly received by the second detector, disposed on an extension of the incident optical path, without being dispersed by the dispersing element.

What is claimed is: 
     
       1. A fluorescent x-ray spectrometer comprising: an irradiation chamber for causing fluorescent x-ray to be generated by irradiating excitation x-ray on a sample disposed therein;   a detection chamber adjacent said irradiation chamber, an incident optical path being defined inside said detection chamber for a part of said fluorescent x-ray introduced from said irradiation chamber into said detection chamber, said detection chamber containing therein a dispersing element and a first detector corresponding to said dispersing element for detecting x-ray dispersed by said dispersing element, said dispersing element being retractable inside said detection chamber from said incident optical path; and   a second detector for detecting x-ray energy disposed on an extension of said incident optical path.   
     
     
       2. The fluorescent x-ray detector of claim 1 further comprising a signal processing circuit for processing signals received selectively from said first detector or from said second detector and a switching circuit for causing signals selectively from said first detector or said second detector to be transmitted to said signal processing circuit. 
     
     
       3. The fluorescent x-ray detector of claim 2 further comprising a data processing part connected to said signal processing circuit for analyzing data contained in signals received from said signal processing circuit. 
     
     
       4. The fluorescent x-ray detector of claim 1 further comprising a first Soller slit and a second Soller slit, both disposed inside said detection chamber, said first Soller slit being disposed between said irradiation chamber and said dispersing element and serving to define said incident optical path, said second Soller slit being disposed between said dispersing element and said first detector. 
     
     
       5. The fluorescent x-ray detector of claim 2 further comprising a first Soller slit and a second Soller slit, both disposed inside said detection chamber, said first Soller slit being disposed between said irradiation chamber and said dispersing element and serving to define said incident optical path, said second Soller slit being disposed between said dispersing element and said first detector. 
     
     
       6. The fluorescent x-ray detector of claim 3 further comprising a first Soller slit and a second Soller slit, both disposed inside said detection chamber, said first Soller slit being disposed between said irradiation chamber and said dispersing element and serving to define said incident optical path, said second Soller slit being disposed between said dispersing element and said first detector.