DC sputtering system

Abstract

A DC sputtering system improved in prevention of fusion of a substrate and electric corrosion of a pallet revolving shaft due to the flow of negative electric charges at the time of production of an optical disk. The system includes a pair of electrodes, a negative electrode and a positive electrode, wherein the negative electrode is composed of a target plate made from a target material such as Si and a backing plate on which the target plate is fixedly placed, and the positive electrode is composed of a pallet disposed opposite to the negative electrode. A substrate of an optical disk is mounted on the positive electrode side through a disk base using an inner peripheral mask and an outer peripheral mask. Each of the inner peripheral mask and the outer peripheral mask is made from or covered with an electrically insulating material such as teflon or ceramic. This prevents the flow of negative electric chargers from being concentrated at the inner peripheral mask and the outer peripheral mask, to thereby protect the substrate from being fused.

What is claimed: 
     
       1. A DC sputtering system for forming an optical recording medium comprising an optical disk substrate having at least one dielectric film disposed thereon, said DC sputtering system comprising: a carrier having a cylindrical mounting aperture;   a cylindrical insulator member having an upstanding peripheral lip at one end thereof telescopically received in said cylindrical mounting aperture so that said peripheral lip abuts a peripheral surface of the carrier adjacent the cylindrical mounting aperture;   a cylindrical bearing housing telescopically received in the cylindrical insulator member;   a substantially planar pallet member having a disk receiving surface and a central cylindrical shaft projecting rearwardly from the pallet member opposite the disk receiving surface, said pallet member being telescopically received in said bearing housing and rotatably mounted in said bearing housing with a plurality of bearings disposed between said shaft and said bearing housing.   
     
     
       2. A DC sputtering system as defined in claim 1, wherein the cylindrical insulator member comprises an insulator selected from the group consisting of: ceramic, glass, rubber, polytetrafluoroethylene and epoxy resin. 
     
     
       3. A DC sputtering system for forming an optical recording medium comprising an optical disk substrate having at least one dielectric film disposed thereon, said DC sputtering system comprising: a substantially planar pallet having a disk receiving surface and an opposing rear surface;   an insulator member having a hollow cylindrical configuration including an upstanding peripheral lip flange at a first end thereof mounted to said rear surface and a shaft receiving opening defined therein;   a rotatable shaft telescopically received in the shaft receiving opening through an opposed second end of the insulator member; and   a grounded connector connecting said insulator member and said rotatable shaft.   
     
     
       4. A DC sputtering system as defined in claim 3, wherein the insulator member comprises an insulator selected from the group consisting of: ceramic, glass, rubber, polytetrafluoroethylene and epoxy resin.