Non-planar micro-optical structures

Abstract

In one embodiment, the present invention provides a microlens having very small focal length. The present invention also provides a non-planar microstructure having a covering layer which is slowly oxidizing or substantially free of oxygen. The present invention also provides methods for forming such microlenses and microstructures. In addition, the present invention provides a VCSEL which includes one or more non-planar microstructures of the present invention.

What is claimed is: 
     
       1. A non-faceted microlens consisting essentially of a non-amorphous material and having a focal length of 50 μm or less. 
     
     
       2. The microlens of claim 1, wherein said microlens has a focal length of 40 μm or less. 
     
     
       3. The microlens of claim 1, wherein said microlens has a focal length of 30 μm or less. 
     
     
       4. The microlens of claim 1, wherein said microlens has a diameter of 30 μm or less. 
     
     
       5. The microlens of claim 1, wherein said microlens is astigmatic. 
     
     
       6. The microlens of claim 1, wherein said microlens comprises a semiconductor material. 
     
     
       7. The microlens of claim 1, wherein said microlens comprises a group III-V semiconductor material. 
     
     
       8. The microlens of claim 1, wherein said microlens comprises GaAs. 
     
     
       9. An array of microlenses mounted on a substrate, each of said microlenses consisting essentially of a non-amorphous material and having a focal length of 50 μm or less. 
     
     
       10. The array of claim 9, wherein each of said microlenses has a focal length of 40 μm or less. 
     
     
       11. The array of claim 9, wherein said of said microlenses has a focal length of 30 μm or less. 
     
     
       12. The array of claim 9, wherein each of said microlenses has a diameter of 30 μm or less. 
     
     
       13. The array of claim 9, wherein each of said microlenses comprises a semiconductor material. 
     
     
       14. The array of claim 9, wherein each of said microlenses comprises a group III-V semiconductor material. 
     
     
       15. The array of claim 9, wherein each of said microlenses comprises GaAs. 
     
     
       16. The microlens of claim 1, wherein said microlens consists essentially of a crystalline material. 
     
     
       17. The array of microlenses of claim 9, wherein each of said microlenses consists essentially of a crystalline material.