Method for fabricating interconnects of a dynamic random access memory (DRAM)

Abstract

A method for fabricating interconnects of a DRAM, in which the contact windows are formed segment by segment and the contact windows are filled segment by segment to form interconnects. Also, tungsten plugs are used to replace the polysilicon plugs and the polysilicon bit lines, so as to reduce the resistance and increase the operating speed.

What is claimed is:  
     
       1. A method of fabricating interconnects of a DRAM for electrically connecting between a lower electrode of the DRAM and one of two source/drain regions of a transistor of the DRAM, comprising the steps of: 
       providing a substrate, wherein at least the transistor is formed on the substrate, and the transistor comprising one gate and the source/drain regions beside the gate in the substrate;  
       forming a first insulating layer on the substrate;  
       forming a plurality of first contact windows in the first insulating layer to expose the source/drain regions on the substrate;  
       forming a plurality of tungsten plugs to fill each of the first contact windows, wherein the tungsten plugs are level with a surface of the first insulating layer;  
       forming a second insulating layer on the first insulating layer and the tungsten plugs  
       forming a second contact window to expose one of the tungsten plugs;  
       forming at least one capacitor on the second contact window connecting one of the tungsten plugs;  
       filling the second contact window with a polysilicon layer which is further patterned into a lower electrode of the capacitor, so that the capacitor is electrically connected with one of the source/drain regions via the contact plug exposed by the second contact window.  
     
     
       2. The method of claim  1 , wherein the gate comprises a silicon nitride layer and a spacer surrounding the gate. 
     
     
       3. The method of claim  1 , wherein the step of forming the first insulating layer comprises forming a silicon oxide layer on the substrate and forming a borophosphosilicate glass (BPSG) layer on the silicon oxide layer, wherein the silicon oxide layer has a thickness of about 2000 Å and the BPSG layer has a thickness of about 7500 Å. 
     
     
       4. The method of claim  1 , wherein the step of forming the second insulating layer comprises forming a silicon oxide layer on the substrate and forming a borophosphosilicate glass (BPSG) layer on the silicon oxide layer, wherein the silicon oxide layer has a thickness of about 2000 Å and the BPSG layer has a thickness of about 7500 Å. 
     
     
       5. The method of claim  1 , wherein the step of forming the first contact windows comprises a self-aligned contact (SAC) method. 
     
     
       6. The method of claim  1 , further comprising forming a dielectric layer on the lower electrode and forming an upper electrode on the dielectric layer. 
     
     
       7. The method of claim  6 , wherein the lower electrode is doped polysilicon. 
     
     
       8. The method of claim  6 , wherein the upper electrode is doped polysilicon. 
     
     
       9. The method of claim  6 , wherein the step of forming the dielectric layer comprises a multi-layer structure of oxide/nitride/oxide (ONO), wherein the formation of ONO comprises: 
       forming a first silicon oxide layer on the surface of the lower electrode by an oxidation method;  
       depositing a silicon nitride layer on the first silicon oxide layer; and  
       forming a second silicon oxide layer on the surface of the silicon nitride layer by using a thermal oxidation method.  
     
     
       10. A method of fabricating interconnects of a DRAM, comprising the steps of: 
       providing a substrate, wherein at least one transistor is formed on the substrate, and the transistor comprises one gate and two source/drain regions beside the gate in the substrate;  
       forming a first insulating layer on the substrate;  
       forming a plurality of first contact windows in the first insulating layer to expose the source/drain regions on the substrate;  
       forming a plurality of first tungsten plug to fill each of the first contact windows;  
       forming a second insulating layer on the first insulating layer and the first tungsten plugs;  
       forming a plurality of second windows in the second insulating layer to expose a portion of the first tungsten plugs; and  
       forming a plurality of second tungsten plugs to couple with the first tungsten plugs by filling the second contact windows with tungsten.  
     
     
       11. The method of claim  10 , wherein the gate comprises a silicon nitride layer and a spacer surrounding the gate. 
     
     
       12. The method of claim  10 , wherein the step of forming the first insulating layer comprises forming a silicon oxide layer on the substrate and forming a borophosphosilicate glass (BPSG) layer on the silicon oxide layer, wherein the silicon oxide layer has a thickness of about 2000 Å and the BPSG layer has a thickness of about 7500 Å. 
     
     
       13. The method of claim  10 , wherein the step of forming the second insulating layer comprises forming a silicon oxide layer on the substrate and forming a borophosphosilicate glass (BPSG) layer on the silicon oxide layer, wherein the silicon oxide layer has a thickness of about 2000 Å and the BPSG layer has a thickness of about 7500 Å. 
     
     
       14. The method of claim  10 , wherein the step of forming the first contact windows comprises a self-aligned contact (SAC) method. 
     
     
       15. A method of forming a tungsten interconnect, comprising: 
       providing a substrate comprising a conductive region therein;  
       forming a first insulating layer with a first opening exposing the conductive region on the substrate;  
       forming a first segment of the tungsten interconnect in the first opening, the first segment of the tungsten interconnect being level with the first insulating layer;  
       forming a second insulating layer with a second opening aligned with the first opening to expose the first segment of the tungsten interconnect; and  
       filling the second opening with a second segment of the tungsten interconnect, so that the tungsten interconnect comprising a first portion and a second portion is formed, wherein each of the first segment and second segment has a lower aspect ratio compared to the tungsten interconnect.