Microprobe chip for detecting evanescent waves probe provided with the microprobe chip and evanescent wave detector, nearfield scanning optical microscope, and information regenerator provided with the microprobe chip

Abstract

A microprobe chip for detecting evanescent waves includes a photoconductive material and a substrate for supporting the photoconductive material. The photoconductive material is connected to electrodes formed on the substrate. A method for making a microprobe chip for detecting evanescent waves includes forming a film comprising a photoconductive material on a peeling layer of a first substrate, the film having a shape of the microprobe chip, and transferring the film on the peeling layer onto a junction layer provided on a second substrate. A method for making a probe provided with a microprobe chip for detecting evanescent waves includes forming a film comprising a photoconductive material and having the shape of the microprobe chip on a peeling layer of a first substrate, forming a thin film cantilever on a second substrate, and transferring the film on the peeling layer onto a junction layer formed on the thin film cantilever.

What is claimed is:  
     
       1. A microprobe chip for detecting evanescent waves comprising a photoconductive layer which consists of a photoconductive material, wherein said photoconductive layer is supported on a substrate with electrodes. 
     
     
       2. A microprobe chip for detecting evanescent waves comprising a photoconductive layer which consists of a photoconductive material, wherein said photoconductive layer is supported on a substrate with electrodes, and 
       wherein said photoconductive material is an amorphous semiconductive material.  
     
     
       3. A microprobe chip according to claim  2 , wherein said amorphous semiconductive material comprises amorphous silicon or amorphous chalcogenide. 
     
     
       4. A microprobe chip for detecting evanescent waves comprising a photoconductive layer which consists of a photoconductive material, wherein said photoconductive layer is supported on a substrate with electrodes, and 
       wherein said photoconductive material comprises an organic photoconductive material.  
     
     
       5. A microprobe chip for detecting evanescent waves comprising a photoconductive layer which consists of a photoconductive material, wherein said photoconductive layer is supported on a substrate with electrodes, and 
       wherein said microprobe chip has a pyramidal shape.  
     
     
       6. A probe provided with the microprobe chip of claim  1 , comprising a cantilever for supporting the microprobe chip on a free end thereof. 
     
     
       7. An apparatus for detecting evanescent waves comprising: 
       a microprobe chip comprising a photoconductive material;  
       a substrate provided with electrodes thereon for supporting said microprobe chip;  
       a means for applying a voltage to said microprobe chip through said electrodes; and  
       a means for detecting photocurrent flows in said microprobe chip through said electrodes,  
       wherein said evanescent waves are detected as said photocurrent.  
     
     
       8. An apparatus for observing a surface of a test piece using evanescent waves, comprising: 
       a microprobe chip comprising a photoconductive material and having a tip;  
       a substrate provided with electrodes thereon for supporting said microprobe chip;  
       a means for radiating light onto the test piece;  
       a means for applying a voltage to said microprobe chip through said electrodes; and  
       a means for detecting photocurrent flows in said microprobe chip through said electrodes,  
       wherein evanescent waves occurring on the test piece responsive to irradiation with light are converted into photocurrent by said means for applying a voltage and said microprobe chip, and are detected as said photocurrent to provide surface information relating to the test piece.  
     
     
       9. An apparatus for regenerating information on a recording medium using evanescent waves, comprising: 
       a microprobe chip comprising a photoconductive material and having a tip;  
       a substrate provided with electrodes thereon for supporting the said microprobe chip;  
       a means for radiating light onto  the recording medium;  
       a means for applying a voltage to said microprobe chip through said electrodes; and  
       a means for detecting photocurrent flows in said microprobe chip through the electrode,  
       wherein the evanescent waves occurring on the recording medium responsive to irradiation with light are converted into photocurrent by said means for applying a voltage and said microprobe chip, and are detected as said photocurrent to regenerate the information on the recording medium.  
     
     
       10. An apparatus according to any one of claims  7  to  9 , wherein said photoconductive material is an amorphous semiconductive material. 
     
     
       11. An apparatus according to claim  10 , wherein said amorphous semiconductive material comprises amorphous silicon or amorphous chalcogenide. 
     
     
       12. An apparatus according to any one of claims  7  to  9 , wherein said photoconductive material comprises an organic photoconductive material. 
     
     
       13. An apparatus according to any one of claims  7  to  9 , wherein said microprobe chip has a pyrimidal shape.