Matrix substrate and liquid crystal display device using the same in which the distance between the upper surface of the pixels being less than the distance between the lower surface of the pixels in contact with the substrate

Abstract

A matrix substrate includes a plurality of conductive members constituting pixels provided on a substrate, the plurality of conductive members forming substantially a smooth plane, wherein the matrix substrate further comprises a nonconductive section for insulating the plurality of conductive members from each other, the distance between two adjacent conductive members being lower at the surfaces of the conductive members than at the side of the substrate.

What is claimed is:  
     
       1. A matrix substrate comprising a plurality of conductive members constituting pixels provided on a substrate, said plurality of conductive members forming substantially a smooth plane, wherein 
       said matrix substrate further comprises a nonconductive section for insulating said plurality of conductive members from each other, the distance between two adjacent conductive members being less when measured at the upper surfaces of the conductive members than when measured at the lower surfaces of the conductive members in contact with the substrate.  
     
     
       2. A matrix substrate according to  claim 1 , wherein a ratio H/L of the height of the nonconductive members H to a distance L between two adjacent conductive members H is in a range of 0.2 to 1.0. 
     
     
       3. A matrix substrate according to  claim 1 , wherein a nonconductive film is disposed on the bottom surface of the conductive members, and further a conductive film is provided so as to be in contact with the surface of the nonconductive film. 
     
     
       4. A matrix substrate according to  claim 3 , wherein the dielectric constant of said nonconductive section is, smaller than the dielectric constant of the nonconductive film. 
     
     
       5. A matrix substrate according to  claim 3 , wherein the distance between two adjacent conductive members is larger than the thickness of the nonconductive film. 
     
     
       6. A matrix substrate according to  claim 3 , wherein said nonconductive section comprises a silicon oxide film. 
     
     
       7. A matrix substrate according to  claim 3 , wherein the nonconductive film comprises a silicon nitride film. 
     
     
       8. A matrix substrate according to  claim 3 , wherein the nonconductive film comprises a tantalum oxide film. 
     
     
       9. A matrix substrate according to  claim 1 , wherein said nonconductive section is formed of a plurality of materials. 
     
     
       10. A matrix substrate according to  claim 3 , wherein the nonconductive film comprises a plurality of materials. 
     
     
       11. A matrix substrate according to  claim 3 , wherein the conductive film is disposed on the bottom surface of said nonconductive section. 
     
     
       12. A matrix substrate according to  claim 1 , wherein said pixels are connected to switching transistors. 
     
     
       13. A matrix substrate according to  claim 12 , wherein each of the switching transistors comprises a CMOS device. 
     
     
       14. A liquid crystal device comprising a matrix substrate having conductive members constituting pixels provided on a substrate, said plurality of conductive members forming substantially a smooth plane, a counter substrate, and a liquid crystal material placed between said plurality of conductive members and said counter-substrates, wherein 
       said matrix substrate further comprises a nonconductive section for insulating said plurality of conductive members from each other, the distance between two adjacent conductive members being less when measured at the upper surfaces of the conductive members than when measured at the lower surfaces of the conductive members in contact with the substrate.  
     
     
       15. A liquid crystal device according to  claim 14 , wherein a ratio H/L of the height of the nonconductive members H to a distance L between two adjacent conductive members H is in a range of 0.2 to 1.0. 
     
     
       16. A liquid crystal device according to  claim 14 , wherein a nonconductive film is disposed on the bottom surface of the conductive members, and further a conductive film is disposed so as to be in contact with the surface of the nonconductive film. 
     
     
       17. A liquid crystal device according to  claim 16 , wherein the dielectric constant of said nonconductive section is smaller that the dielectric constant of the nonconductive film. 
     
     
       18. A liquid crystal device according to  claim 16 , wherein the distance between two adjacent conductive members is larger that the thickness of the nonconductive film. 
     
     
       19. A liquid crystal device according to  claim 16 , wherein said nonconductive section comprises a silicon oxide film. 
     
     
       20. A liquid crystal device according to  claim 16 , wherein the nonconductive film comprises a silicon nitride film. 
     
     
       21. A liquid crystal device according to  claim 16 , wherein the nonconductive film comprises a tantalum oxide film. 
     
     
       22. A liquid crystal device according to  claim 14 , wherein said nonconductive section is formed of a plurality of materials. 
     
     
       23. A liquid crystal device according to  claim 16 , wherein the nonconductive film is formed of a plurality of materials. 
     
     
       24. A liquid crystal device according to  claim 16 , wherein the conductive film is disposed on the bottom surface of said nonconductive section. 
     
     
       25. A liquid crystal device according to  claim 14 , wherein said pixels are connected to switching transistors. 
     
     
       26. A liquid crystal device according to  claim 25 , wherein each of the switching transistors comprises a CMOS device. 
     
     
       27. A liquid crystal device according to  claim 14 , wherein a glass sheet is provided on said matrix substrate. 
     
     
       28. A liquid crystal device according to  claim 27 , wherein a plurality of microlenses are provided on the glass sheet. 
     
     
       29. A liquid crystal device according to  claim 27 , wherein one of the plurality of microlenses is provided for each three said pixels. 
     
     
       30. A projection-type liquid crystal display device comprising a liquid crystal display device according to  claim 14 . 
     
     
       31. A projection-type liquid crystal display device according to  claim 30 , comprising three liquid crystal display devices for projecting three color images, a high reflectance mirror and a blue-reflecting dichroic mirror for separating blue light and a red-reflecting dichroic mirror and a green/blue reflecting dichroic mirror for separating red light and green light. 
     
     
       32. A reflection-type liquid crystal display device comprising a liquid crystal display device according to  claim 14 .