Electrical detection of V-groove width

Abstract

An apparatus detects the width of a V-groove formed on a semiconductor wafer. A resistor overlaps a chip area and an area upon which the V-groove is to be etched on the wafer. A pad etched on the silicon wafer is coupled to the resistor. A tester supplies voltage to the pad after the V-groove has been etched into the silicon wafer; and a circuit coupled to the pad determines the width of the etched V-groove.

What is claimed is:  
     
       1. An apparatus for detecting width of a V-groove on a semiconductor wafer, comprising: 
       a V-groove width monitor resistor overlapping a chip area and an area upon which the V-groove is to be etched;  
       a pad etched on the silicon wafer and coupled to the V-groove width monitor resistor; and  
       a tester supplying voltage to the pad after the V-groove has been etched into the silicon wafer; and  
       means, coupled to the pad, for determining the width of the etched V-groove.  
     
     
       2. The apparatus as in  claim 1 , wherein the pad is an input/output pad. 
     
     
       3. The apparatus as in  claim 1 , wherein the pad is a separate test pad for testing V-groove width only. 
     
     
       4. The apparatus as in  claim 1 , further comprising a pull up resistance connected to the V-groove width monitor resistor and the pad.