US6400010B1ExpiredUtility

Substrate including a metal portion and a resin portion

78
Assignee: SEIKO EPSON CORPPriority: Feb 17, 1998Filed: Feb 16, 1999Granted: Jun 4, 2002
Est. expiryFeb 17, 2018(expired)· nominal 20-yr term from priority
Inventors:Akihiro Murata
H10W 90/754H10W 90/724H10W 74/15H10W 74/00H10W 72/5445H10W 72/5363H10W 72/951H10W 72/536H10W 72/50H10W 72/29H10W 70/655H10W 70/635H10W 70/65H05K 3/445H10W 72/00H05K 3/427H05K 2203/1438H05K 2201/09636H05K 2201/0195H05K 1/056H05K 2201/09645
78
PatentIndex Score
46
Cited by
8
References
17
Claims

Abstract

A semiconductor device comprising a substrate including a metal portion and a resin portion and having a plurality of through holes formed in the resin portion, conductive members formed within the through holes, a semiconductor chip attached to one surface of the substrate, and a plurality of solder balls attached to the other surface of the substrate. The semiconductor chip and solder balls are electrically connected through the conductive members.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
       1. A semiconductor device, comprising: 
       a substrate for a semiconductor device, wherein said substrate includes a core layer formed of a metal, a through hole formation portion formed in said core layer, a plurality of through holes formed in said through hole formation portion, insulating layers formed on both sides of said core layer, and wires formed on said insulating layer and achieving electrical conductivity through said through holes from one surface to the other of said core layer; and  
       a semiconductor chip provided on said substrate for a semiconductor device, and having electrodes electrically connected to said wires,  
       wherein an opening is formed in said core layer;  
       wherein said through hole formation portion is formed by filling said opening with an insulating material; and  
       wherein said through holes are formed in said insulating material.  
     
     
       2. The semiconductor device as defined in  claim 1 , wherein said insulating material is a resin. 
     
     
       3. The semiconductor device as defined in  claim 1 , wherein said opening is formed in at least one of a peripheral portion and a central portion of said core layer. 
     
     
       4. The semiconductor device as defined in  claim 3 , wherein said semiconductor chip is disposed on the central portion of said core layer and is also mounted over at least one of said through holes. 
     
     
       5. The semiconductor conductor as defined in  claim 4 , wherein said semiconductor chip is mounted over said through hole through an adhesive. 
     
     
       6. The semiconductor device as defined in  claim 5 , wherein said adhesive is a thermally conductive material. 
     
     
       7. The semiconductor device as defined in  claim 1 , wherein said through holes are disposed in zigzag. 
     
     
       8. The semiconductor device as defined in  claim 3 , 
       wherein said opening is formed on the peripheral portion of said core layer along the edge of said core layer, with an opening length longer close to the peripheral portion than close to the central portion of said core layer;  
       wherein said through holes are arranged in zigzag on a plurality of phantom lines that are imagined to be over said opening and to extend parallel to a longitudinal direction of said opening; and  
       wherein the number of said through holes arranged on one of said phantom lines that is close to the edge of said core layer is larger than the number of said through holes arranged on one of said phantom lines that is close to the central portion of said core layer.  
     
     
       9. The semiconductor device as defined in  claim 8 , 
       wherein said wires include inner leads extending from said through holes toward the central portion of said core layer, and connected to electrodes of said semiconductor chip.  
     
     
       10. A substrate for a semiconductor device, comprising: 
       a core layer formed of a metal;  
       a through hole formation portion formed in a part of said core layer;  
       a plurality of through holes formed in said through hole formation portion;  
       insulating layers formed on both sides of said core layer; and  
       wires formed on said insulating layers and achieving electrical conductivity through said through holes from one surface to the other of said core layer,  
       wherein an opening is formed in said core layer;  
       wherein said through hole formation portion is formed by filling said opening with an insulating material; and  
       wherein said through holes are formed in said insulating material.  
     
     
       11. The substrate for a semiconductor device as defined in  claim 10 , 
       wherein said insulating material is a resin.  
     
     
       12. The substrate for a semiconductor device as defined in  claim 10 , 
       wherein said opening is formed in at least one of a peripheral portion and a central portion of said core layer.  
     
     
       13. The substrate for a semiconductor device as defined in  claim 10 , wherein said through holes are disposed in zigzag. 
     
     
       14. The substrate for a semiconductor device as defined in  claim 12 , 
       wherein said opening is formed on the peripheral portion of said core layer along the edge of said core layer, with an opening length longer close to the peripheral portion than close to the central portion of said core layer;  
       wherein said through holes are arranged in zigzag on a plurality of phantom lines that are imagined to be over said opening and to extend parallel to a longitudinal direction of said openings; and  
       wherein the number of said through holes arranged on one of said phantom lines that is close to the edge of said core layer is larger than the number of said through holes arranged on one of said phantom lines that is close to the central portion of said core layer.  
     
     
       15. The substrate for a semiconductor device as defined in  claim 14 , 
       wherein said wires comprise inner leads extending from said through holes toward the central portion of said core layer, and plating leads extending from said through holes toward outside of said core layer.  
     
     
       16. A substrate for a semiconductor device, comprising: 
       a core layer formed of a metal;  
       through hole formation portions formed in said core layer;  
       a plurality of through holes formed in said through hole formation portions;  
       insulating layers formed on both sides of said core layer; and  
       wires formed on said insulating layers and achieving electrical conductivity through said through holes from one surface to the other of said core layer,  
       wherein a first opening is formed in a central portion of said core layer, and a second opening is formed in a peripheral portion of said core layer;  
       wherein said through hole formation portions are formed by filling said first and second openings with an insulating material;  
       wherein a first group of said through holes are formed in zigzag in said insulating material within said first opening, and a second group of said through holes are formed in zigzag in said insulating material within said second opening; and  
       wherein a first group of said wires are formed to extend from said first group of said through holes to short of said second opening, and a second group of said wires are formed to extend from said second group of said through holes to short of said first opening, said first and second groups of wires being disposed in an alternating fashion.  
     
     
       17. A substrate for a semiconductor device, comprising: 
       a core layer formed of a metal;  
       insulating layers formed on both sides of said core layer;  
       a plurality of through hole formation portions formed around each of a plurality of semiconductor chip mounting regions in said core layer;  
       a plurality of through holes formed on both sides of a central portion of each of said through hole formation portions;  
       a plating wire passing over said central portion of each of said through hole formation portions;  
       plating leads connecting from said plating wires to said through holes; and  
       inner leads extending from said through holes to over said insulating layers outside said through hole formation portions,  
       wherein openings are formed in said core layer;  
       wherein said through hole formation portions are formed by filling said openings with an insulating material; and

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