Antihalation compositions

Abstract

Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.

What is claimed is:  
     
       1. An antihalation coating comprising a resin binder and a crosslinker compound capable of causing crosslinking reaction of the resin binder said resin binder conforming to the formula:                    
       where x varies between 0.1 and 1.0, R is hydrogen or alkyl and R′ is a member selected from the group consisting of hydrogen, alkyl, halo and alkoxy. 
     
     
       2. The composition of  claim 1  where R′ is alkyl. 
     
     
       3. The coating of  claim 1  further comprising a compound selected from the group consisting of an acid and an acid generator compound. 
     
     
       4. The coating of  claim 1  further comprising a thermal acid generator. 
     
     
       5. The coating of  claim 1  further comprising a radiation absorbent dye. 
     
     
       6. The coating of  claim 1  where the crosslinker is an amine-based material. 
     
     
       7. The coating of  claim 1  where the crosslinker is a melamine resin. 
     
     
       8. The coating of  claim 1  where the cross-linker is a glycoluril-formaldehyde resin.