Calibration element for adjustment nozzle

Abstract

In one aspect, a spin-rinse-dry chamber comprises an adjustable nozzle. A calibration element may be positioned in the spin-rinse-dry chamber at which the adjustable nozzle may be directed. Targets (for example cross-hairs in one embodiment) may be located on the calibration element at a position corresponding to where it is desired to direct a fluid flow from the adjustable nozzle. Another aspect provides a method of calibrating a spin-rinse-dry chamber having an adjustable nozzle comprising inserting a calibration element having a similar contour as a substrate into the spin-rinse-dry chamber. Fluid is then directed through the adjustable nozzle at a selected target position located on the surface of the calibration element.

What is claimed is:  
     
       1. An apparatus to be positioned in a spin-rinse-dry chamber, comprising: 
       a calibration element having a similar contour as a substrate configured to be processed in a spin-rinse-dry chamber and having one or more target marks disposed thereon at a radial position to define an annular path on the calibration element during rotation.  
     
     
       2. The apparatus of  claim 1 , wherein the calibration element is adapted to be positioned on a pedestal in a spin-rinse-dry chamber. 
     
     
       3. A method of calibrating a spin-rinse-dry chamber, comprising: 
       inserting a calibration element into a spin-rinse-dry chamber having one or more adjustable nozzles, the calibration element having a similar contour as a substrate and comprising one or more target marks disposed on a surface of the calibration element; and  
       directing fluid through the adjustable nozzles at the target marks.  
     
     
       4. The method of  claim 3 , further comprising adjusting the nozzles to direct the fluid at the target marks. 
     
     
       5. A method of calibrating a spin-rinse-dry chamber, comprising: 
       inserting a calibration element into a spin-rinse-dry chamber having one or more adjustable nozzles, the calibration element having a similar contour as a substrate and comprising one or more target marks disposed on a surface of the calibration element; and  
       aiming fluid the adjustable nozzles at the target marks.  
     
     
       6. The method of  claim 5 , wherein aiming the fluid comprises aiming the fluid so that the fluid continuously extends from a center of the calibration element to the target marks. 
     
     
       7. The method of  claim 5 , further comprising: 
       determining whether the fluid continuously extends from a center of the calibration element to a periphery of the calibration element; and  
       adjusting the adjustable nozzles until the fluid continuously extends from the center of the calibration element to the periphery of the calibration element.  
     
     
       8. The method of  claim 7 , further comprising: 
       rotating the calibration element; and  
       determining whether the surface of the calibration element is covered by the fluid.  
     
     
       9. An apparatus comprising: 
       a spin-rinse-dry chamber comprising at least one adjustable nozzle; and  
       a calibration element positioned within the spin-rinse-dry chamber, wherein the calibration element has a similar contour as a substrate configured to be processed in a spin-rinse-dry chamber, the calibration element includes at least one target mark configured to be impinged by a fluid stream projecting from the at least one adjustable nozzle.  
     
     
       10. The apparatus of  claim 9 , wherein the calibration element is transparent. 
     
     
       11. The apparatus of  claim 9 , wherein the spin-rinse-dry chamber comprises a pedestal, and the calibration element is positioned on the pedestal. 
     
     
       12. The apparatus of  claim 11 , further comprising a drive device that rotates the pedestal. 
     
     
       13. The apparatus of  claim 9 , further comprising a controller coupled to the spin-rinse-dry chamber. 
     
     
       14. The apparatus of  claim 9 , wherein the calibration element is formed from a plastic. 
     
     
       15. An apparatus for calibrating one or more adjustable nozzles in a spin-rinse-dry chamber, comprising: 
       a calibration element having a similar contour as a substrate configured to be processed in a spin-rinse-dry chamber having one or more adjustable nozzles disposed therein; and  
       wherein the calibration element comprises one or more target marks, each target mark being configured to be impinged by a fluid stream projecting from each adjustable noble.  
     
     
       16. The apparatus of  claim 15 , wherein the target marks are disposed on one of an exterior surface of the calibration element and an interior surface of the calibration element. 
     
     
       17. The apparatus of  claim 15 , wherein the calibration element is made from a material of a similar frictional characteristics as the substrate. 
     
     
       18. The apparatus of  claim 15 , wherein the calibration element is made from a material of a similar frictional characteristics as the substrate so that an interaction between the fluid stream and the calibration element indicates an interaction between the fluid stream and the substrate. 
     
     
       19. An apparatus to be positioned in a spin-rinse-dry chamber, comprising: 
       a calibration element having a similar contour as a substrate configured to be processed in a spin-rinse-dry chamber and having one or more target marks positioned thereon to define one or more fluid delivery targets.  
     
     
       20. A method of calibrating a spin-rinse-dry chamber, comprising: 
       inserting a calibration element into a spin-rinse-dry chamber having one or more adjustable nozzles, the calibration element having a similar contour as a substrate;  
       disposing one or more target marks on a surface of the calibration element at a radial position to define an annular path on the calibration element during rotation; and  
       directing fluid through the adjustable nozzles at the target marks.  
     
     
       21. The method of  claim 20 , further comprising adjusting the nozzles to direct the fluid at the target marks. 
     
     
       22. A method of calibrating a spin-rinse-dry chamber, comprising: 
       inserting a calibration element into a spin-rinse-dry chamber having one or more adjustable nozzles, the calibration element having a similar contour as a substrate;  
       disposing one or more target marks on a surface of the calibration element to define one or more fluid delivery targets;  
       directing fluid through the adjustable nozzles at the target marks; and  
       adjusting the nozzles to direct the fluid at the target marks.