Laminated manifold for microvalve

Abstract

A manifold for distributing a fluid. The manifold can be used to distribute a fluid to and from a microvalve. The manifold includes a first plate having a groove formed in one face thereof. A second plate is fixed to the first plate so as to cover the groove to form a fluid passage through the groove. First and second bores are formed through at least one of the first plate and the second plate to form an inlet and an outlet, respectively, of the fluid passage. According to a method of manufacturing, etching the first plate forms the groove. Preferably, an etching process also forms the first and second bores. Also, preferably, the first plate is one of a plurality of plates formed from a single sheet of material. Preferably the sheet of material is a standard sized sheet with locating indicia enabling assembly of the manifold with standard pick and place equipment. Specifically, a method of assembling the manifold includes forming a plurality of first plates from a single sheet; a plurality of second plates from a second sheet; applying a braze material to selected portions of one of the first and second sheets; clamping the sheets together with each of the first plates aligned with a corresponding one of the second plates; heating the first and second sheets, and braze material therebetween, to braze each of the first plates to the corresponding one of the second plates to form a manifold; detaching each manifold from the first and second sheets; and assembling the manifold to a fluid circuit. Optionally, a microvalve is attached to each manifold before the manifold is detached from the first and second sheets.

What is claimed is:  
     
       1. A method for forming a manifold, comprising the steps of: 
       a) etching a first sheet of material to form a first plate;  
       b) etching a second sheet of material to form a second plate;  
       b1) forming a bond pad on said outer surface of said second plate;  
       b2) disposing a braze material between said first plate and said second plate, wherein said bond pad has a first melting temperature, and said braze material has a second melting temperature less than said first melting temperature;  
       c) fixing said first plate to said second plate; and  
       c1) heating said first plate, said second plate, said bond pad, and said braze material to a temperature greater than said second melting temperature and less than said first melting temperature until said braze material melts, then cooling said first plate, said second plate, said bond pad, and said braze material to braze said first plate to said second plate.  
     
     
       2. A method for forming a manifold, comprising the steps of: 
       a) providing a first sheet of material;  
       b) providing a second sheet of material;  
       c) forming a first plate and a second plate from said first and second sheets of material by at least one of etching, stamping, machining, cutting, drilling, and milling;  
       d) forming a bond pad on an outer surface of said second plate, said bond pad having a first melting temperature;  
       e) disposing a braze material having a second melting temperature less than said first melting temperature between said first plate and said second plate;  
       f) heating said first plate, said second plate, said bond pad, and said braze material to a temperature greater than said second melting temperature and less than said first melting temperature until said braze material melts; and  
       g) cooling said first plate, said second plate, said bond pad, and said braze material until said braze material solidifies to braze said first plate to said second plate.  
     
     
       3. A method for forming a manifold, comprising the steps of: 
       a) etching a first sheet of material to form a first plate;  
       b) etching a second sheet of material to form a second plate;  
       c) forming a bond pad on an outer surface of said second plate said bond pad being formed of a material having a first melting temperature;  
       d) disposing a braze material between said first plate and said second plate said braze material having a second melting temperature less than said first melting temperature;  
       e) fixing said first plate to said second plate;  
       f) heating said first plate, said second plate, said bond pad, and said braze material to a temperature greater than said second melting temperature and less than said first melting temperature until said braze material melts, then cooling said first plate, said second plate, said bond pad, and said braze material to braze said first plate to said second plate; and  
       g) fixing a terminal block to the outer surface of said second plate near the bond pad.  
     
     
       4. A method for forming a manifold, comprising the steps of: 
       a) etching a first sheet of material to form a first plate having a plurality of first grooves formed therein, said grooves fanning outwardly from closely spaced first bores positioned about a generally circular perimeter having a first diameter;  
       b) etching a second sheet of material to form a second plate having a plurality of second grooves formed therein, said grooves fanning inwardly from widely spaced second bores positioned about a generally circular perimeter having a second diameter that is greater than said first diameter;  
       c) forming a bond pad on said outer surface of said second plate; and  
       d) fixing said first plate to said second plate such that at least one of said first grooves cooperates with a corresponding one of said second grooves to form a fluid passage from an associated one of said first bores to an associated one of said second bores.