Electron-emitting device, electron source and manufacture method for image-forming apparatus

Abstract

A method of manufacturing an electron-emitting device has a step of forming a pair of conductors on a substrate, the conductors being spaced from each other, and an activation process of depositing carbon or carbon compound on at least one side of the pair of conductors in an atmosphere of carbon compound gas. The activation process includes a plurality of processes of two or more stages including a first process and a second process. The first process is executed in an atmosphere of the carbon compound gas having a partial pressure higher than a partial pressure of the gas in the second process, with the second process being the last activation process.

What is claimed is:  
     
       1. A method of manufacturing an electron-emitting device, comprising the steps of: 
       forming a pair of conductors on a substrate, the conductors being spaced from each other; and  
       an activation process of depositing carbon or carbon compound on at least one side of the pair of conductors in an atmosphere of carbon compound gas,  
       wherein said activation process includes a plurality of processes of two or more stages including a first process and a second process, and the first process is executed in an atmosphere of the carbon compound gas having a partial pressure higher than a partial pressure of the carbon compound gas in the second process, and wherein the second process is the last activation process, wherein  
       the second process is terminated at a smaller value of device current flowing through the pair of conductors than a value of the device current at the termination of the first process.  
     
     
       2. A method of manufacturing an electron source, comprising the steps of: 
       forming plural pairs of conductors on a substrate, the conductors being spaced from each other; and  
       an activation process of depositing carbon or carbon compound on at least one side of each of the plural pairs of conductors in an atmosphere of carbon compound gas,  
       wherein said activation process includes a plurality of processes of two or more stages including a first process and a second process, and the first process is executed in an atmosphere of the carbon compound gas having a partial pressure higher than a partial pressure of the carbon compound gas in the second process, and wherein the second process is the last activation process, wherein  
       the second process is terminated at a smaller value of device current flowing through the pair of conductors than a value of the device current at the termination of the first process.  
     
     
       3. A method of manufacturing an electron source according to  claim 2 , wherein the partial pressure of the carbon compound gas in the first process is 5×10 −4  Pa or higher. 
     
     
       4. A method of manufacturing an electron source according to  claim 2 , wherein the partial pressure of the carbon compound gas in the second process is 5×10 −3  Pa or lower. 
     
     
       5. A method of manufacturing an electron source according to  claim 2 , wherein the first process is terminated in accordance with an evaluation result of electrical characteristics of each of the plural pairs of conductors. 
     
     
       6. A method of manufacturing an electron source according to  claim 5 , wherein the electrical characteristics are a device current flowing through each of the plural pairs of conductors. 
     
     
       7. A method of manufacturing an electron source according to  claim 2 , wherein said activation step of depositing carbon or carbon compound includes a step of applying a voltage to each of the plural pairs of conductors in the atmosphere of the carbon compound gas. 
     
     
       8. A method of manufacturing an electron source according to  claim 2 , wherein said step of forming plural pairs of conductors includes a step of applying a voltage to each of the plural pairs of conductors on the substrate. 
     
     
       9. A method of manufacturing an electron source according to  claim 2 , wherein each of the plural pairs of conductors includes a pair of electroconductive films spaced from each other and a pair of electrodes respectively connected to the pair of electroconductive films. 
     
     
       10. A method of manufacturing an electron source, comprising the steps of: 
       forming a plurality of electroconductive films each including an electron-emitting region and disposed between electrodes; and  
       an activation process of depositing carbon or carbon compound on each of the plurality of electroconductive films in an atmosphere of carbon compound gas,  
       wherein said activation process includes a plurality of processes of two or more stages including a first process and a second process, and the first process is executed in an atmosphere of the carbon compound gas having a partial pressure of the carbon compound gas in the second process, and wherein the second process is the last activation process, wherein  
       the second process is terminated at a smaller value of device current than a value of the device current at the termination of the first process.  
     
     
       11. A method of manufacturing an electron source according to  claim 10 , wherein the partial pressure of the carbon compound gas in the first process is 5×10 −4  Pa or higher. 
     
     
       12. A method of manufacturing an electron source according to  claim 10 , wherein the partial pressure of the carbon compound gas in the second process is 5×10 −3  Pa or lower. 
     
     
       13. A method of manufacturing an electron source according to  claim 10 , wherein the first process is terminated in accordance with an evaluation result of electrical characteristics of each of the plural pairs of conductors. 
     
     
       14. A method of manufacturing an electron source according to  claim 13 , wherein the electrical characteristics are a device current flowing through the electrodes. 
     
     
       15. A method of manufacturing an electron source according to  claim 10 , wherein said activation process of depositing carbon or carbon compound includes a step of applying a voltage to each of the plurality of electroconductive films in the atmosphere of the carbon compound gas. 
     
     
       16. A method of manufacturing an electron source according to  claim 10 , wherein said step of forming plural pairs of electroconductive films includes a step of applying a voltage to each of the plurality of electroconductive films. 
     
     
       17. A method of manufacturing an image-forming apparatus comprising a step of: 
       disposing a frame member facing the electron source manufactured according to any one of claims  2 - 16  the frame member including an image-forming member for forming an image by an electron beam emitted from the electron source.  
     
     
       18. A method of manufacturing an electron-emitting device, comprising the steps of: 
       forming an electroconductive film including an electron-emitting region and disposed between electrodes; and  
       an activation process of depositing carbon or carbon compound on the electroconductive film in an atmosphere of carbon compound gas,  
       wherein said activation process includes a plurality of processes of two or more stages including a first process and a second process, and the first process is executed in an atmosphere of the carbon compound gas having a partial pressure higher than a partial pressure of the carbon compound gas in the second process, and wherein the second process is the last activation process, wherein  
       the second process is terminated at a smaller value of device current than a value of the device current at the termination of the first process.  
     
     
       19. A method of manufacturing an electron source comprising the steps of: 
       forming plural pairs of conductors on a substrate, the conductors being spaced from each other; and  
       an activation process of depositing carbon or carbon compound on at least one side of each of the plural pairs of conductors in an atmosphere of carbon compound gas, wherein  
       said activation process includes a plurality of processes of two or more stages including a first process and a second process, and the first process is executed in an atmosphere of the carbon compound gas having a partial pressure higher than a partial pressure of the carbon compound gas in the second process, and wherein the second process is the last activation process,  
       the first process is terminated in accordance with an evaluation result of electrical characteristics of each of the plural pairs of conductors,  
       the electrical characteristics are a device current flowing through each of the plural pairs of conductors, and  
       the first process is terminated after a predetermined time after the device current exceeds a reference value which is equal to or larger than a device current obtained when the second process is terminated.  
     
     
       20. A method of manufacturing an electron source comprising the steps of: 
       forming a plurality of electroconductive films each including an electron-emitting region and disposed between electrodes; and  
       an activation process of depositing carbon or carbon compound on each of the plurality of electroconductive films in an atmosphere of carbon compound gas, wherein  
       said activation process includes a plurality of processes of two or more stages including a first process and a second process, and the first process is executed in an atmosphere of the carbon compound gas having a partial pressure higher than a partial pressure of the carbon compound gas in the second process, and wherein the second process is the last activation process,  
       the first process is terminated in accordance with an evaluation result of electrical characteristics of each of the plural pairs of conductors,  
       the electrical characteristics are a device current flowing through the electrodes, and  
       the first process is terminated after a predetermined time after the device current exceeds a reference value which is equal to or larger than a device current obtained when the second process is terminated.