Display unit and method of fabricating the same

Abstract

A display unit capable of inhibiting moisture and gas from penetrating into a liquid crystal layer and an alignment layer also after formation of a display electrode and suppressing decomposition of a material forming the display electrode is obtained. In this display unit, an impurity-introduced layer containing an impurity element having high electronegativity is formed on the surface of an insulator film and the surface of the display electrode after formation of the display electrode. Thus, the insulator film and the display electrode are improved in effects of preventing transmission of moisture and gas also after formation of the display electrode. The impurity-introduced layer formed on the surface of the display electrode stabilizes the surface of an ITO film forming the display electrode, thereby suppressing decomposition of the ITO film.

What is claimed is:  
     
       1. A display unit comprising: 
       an insulator film formed on a substrate;  
       a display electrode formed on said insulator film; and  
       an impurity-introduced layer, formed on an upper surface of said display electrode and on an upper surface of said insulator film, containing an impurity element having high electronegativity.  
     
     
       2. The display unit according to  claim 1 , wherein 
       said insulator film includes an insulator film containing an organic component.  
     
     
       3. The display unit according to  claim 1 , wherein 
       said impurity element having high electronegativity includes fluorine.  
     
     
       4. The display unit according to  claim 3 , wherein 
       said impurity-introduced layer is formed on the surface of said insulator film, and includes any of a fluoride layer of a silicon oxide film, a fluoride layer of a silicon nitride film and a fluoride layer of a silicon oxynitride film.  
     
     
       5. The display unit according to  claim 3 , wherein 
       said impurity-introduced layer includes a first layer, formed on the surface of said display electrode, mainly composed of indium fluoride.  
     
     
       6. A display unit comprising: 
       an insulator film formed on a substrate;  
       a display electrode formed on said insulator film; and  
       an impurity-introduced layer, formed on the surface of said display electrode and the surface of said insulator film, comprising a first layer, formed on the surface of said display electrode, mainly composed of indium fluoride, and a second layer, formed on said first layer, mainly composed of carbon fluoride.  
     
     
       7. A display unit comprising: 
       an insulator film formed on a substrate;  
       a display electrode formed on said insulator film; and  
       a first layer, formed on an upper surface of said display electrode, mainly composed on indium fluoride.  
     
     
       8. A display unit comprising: 
       an insulator film formed on a substrate;  
       a display electrode formed on said insulator film;  
       a first layer, formed on the surface of said display electrode, mainly composed of indium fluoride, and a second layer, formed on said first layer, mainly composed of carbon fluoride.  
     
     
       9. A display unit comprising: 
       an insulator film formed on a substrate;  
       a display electrode formed on said insulator film; and  
       an impurity-introduced layer, formed on a surface of said display electrode which is not opposite to the substrate and on a surface of said insulator film which is not opposite to the substrate, containing an impurity element having high electronegativity.  
     
     
       10. The display unit according to  claim 9 , wherein 
       said insulator film includes an insulator film containing an organic component.  
     
     
       11. The display unit according to  claim 9 , wherein 
       said impurity element having high electronegativity includes fluorine.  
     
     
       12. The display unit according to  claim 11 , wherein, 
       said impurity-introduced layer is formed on the surface of said insulator film, and includes any of a fluoride layer of a silicon oxide film, a fluoride layer of a silicon nitride film and a fluoride layer of a silicon oxynitride film.  
     
     
       13. The display unit according to  claim 11 , wherein 
       said impurity-introduced layer includes a first layer, formed on the surface of said display electrode, mainly composed of indium fluoride.  
     
     
       14. A display unit comprising: 
       an insulator film formed on a substrate;  
       a display electrode formed on said insulator film; and  
       a first layer, formed on a surface of said display electrode which is not opposite to the substrate, mainly composed of indium fluoride.  
     
     
       15. The display unit according to  claim 14 , wherein 
       said insulator film includes an insulator film containing an organic component.  
     
     
       16. The display unit according to  claim 14 , wherein 
       first layer is formed on the surface of said insulator film, and includes any of a fluoride layer of a silicon oxide film, a fluoride layer of a silicon nitride film and a fluoride layer of a silicon oxynitride film.