Micro-electro mechanical system having single anchor

Abstract

A micro-electro mechanical system (MEMS) switch having a single anchor is provided. The MEMS switch includes a substrate; grounding lines installed on the substrate to be distant away from each other; signal transmission lines positioned at predetermined intervals between the grounding lines; an anchor placed between the signal transmission lines; a driving electrode that encircles the anchor while not being in contact with the anchor, the signal transmission lines and the grounding lines; and a moving plate that is positioned on the driving electrode to be overlapped with portions of the signal transmission lines, and connected to the anchor elastically.

What is claimed is:  
     
       1. An MEMS switch comprising: 
       a substrate;  
       grounding lines installed on the substrate to be distant away from each other;  
       signal transmission lines positioned at predetermined intervals between the grounding lines;  
       an anchor placed between the signal transmission lines;  
       a driving electrode not being in contact with the anchor, the signal transmission lines and the grounding lines, the driving electrode for encircling the anchor; and  
       a moving plate positioned on the driving electrode to be overlapped with portions of the signal transmission lines, the moving plate connected to the anchor elastically.  
     
     
       2. The MEMS switch of  claim 1 , wherein the moving plate is connected to the anchor via springs. 
     
     
       3. The MEMS switch of  claim 1 , wherein the moving plate encircles the anchor. 
     
     
       4. The MEMS switch of  claim 2 , wherein the moving plate and the anchor are connected to each other via four planar springs. 
     
     
       5. The MEMS switch of  claim 1 , the width of the moving plate perpendicular to the grounding lines is the same as the widths of the signal transmission lines. 
     
     
       6. The MEMS switch of  claim 1 , wherein the driving electrode is geometrically shaped the same as the moving plate. 
     
     
       7. The MEMS switch of  claim 4 , wherein one end of each of the four planar spring is connected to the four corners of the anchor, but the one end of each plate spring is connected to one of two surface consisting of each corner, and the other end of each planar spring is extended from the one end along the surface of the anchor, to which the one end is connected, to connect to the inner surface of the moving plate which is opposite to the other surface of the anchor adjacent to the surface to which the one end is connected. 
     
     
       8. The MEMS switch of  claim 1 , wherein the anchor comprises: 
       a base formed on the substrate; and  
       a holder formed on the base.