Electrostatic actuator and method of driving the same

Abstract

A first stator is provided with stator electrodes sequentially arranged in a predetermined direction. An extended electrode is mounted on a second stator arranged to face the first stator. A slider is movably arranged between the first and second stators. The slider is provided with a large number of slider electrodes arranged to face the stator electrodes and a second slider electrode facing the extended electrode. The slider electrodes are maintained at the ground potential. A first and second driving voltage are periodically applied to the stator electrodes and to the extended electrode, respectively, which are opposite to each other in phase and are periodically switched between the ground potential and the positive driving voltage. Thus, the slider is moved in a direction while being vibrated.

What is claimed is:  
     
       1. An electrostatic actuator mechanism, comprising: 
       a first stator provided with an electrode group including at least three electrodes successively arranged in a predetermined direction, voltage being applied to the electrodes respectively;  
       a second stator arranged to face the first stator and provided with a planar electrode extending in the predetermined direction;  
       a movable member arranged between the first stator and the second stator, and provided with a first electrode section facing the electrode group and a second electrode section facing the electrode extending in the predetermined direction; and  
       a switching circuit configured to apply voltage alternately to at least one of the electrodes forming the electrode group and the electrode extending in the predetermined direction, the potential of at least one of the electrodes forming the electrode group being rendered higher than the potential of the first electrode section, or the potential of the electrode extending in the predetermined direction being rendered higher than the potential of the second electrode section, and to switch the order of applying voltage successively to at least one of the electrodes of the electrode group.  
     
     
       2. The electrostatic actuator mechanism according to  claim 1 , wherein the switching circuit applies voltage simultaneously to at least two electrodes forming the electrode group adjacent to each other in the predetermined direction. 
     
     
       3. The electrostatic actuator mechanism according to  claim 1 , wherein the width in the predetermined direction of the first electrode section mounted to the movable member is 1.5 to 2.5 times as much as the width in the predetermined direction of each of the electrodes forming the electrode group. 
     
     
       4. The electrostatic actuator mechanism according to  claim 1 , further comprising a dielectric film formed to cover the electrode group. 
     
     
       5. The electrostatic actuator mechanism according to  claim 4 , wherein the switching circuit is configured to impair a potential difference such that the potential of at least one of the electrodes forming the electrode group is rendered lower than the potential of the first electrode section, when voltage is applied to the electrode extending in the predetermined direction. 
     
     
       6. The electrostatic actuator mechanism according to  claim 1 , further comprising a dielectric film formed to cover the first electrode section. 
     
     
       7. The electrostatic actuator mechanism according to  claim 6 , wherein the switching circuit is configured to impair a potential difference such that the potential of at least one of the electrodes forming the electrode group is rendered lower than the potential of the first electrode section, when voltage is applied to the electrode extending in the predetermined direction. 
     
     
       8. The electrostatic actuator mechanism according to  claim 6 , wherein the first and second electrode sections bear substantially the ground potential. 
     
     
       9. The electrostatic actuator mechanism according to  claim 1 , wherein the movable member is provided with an optical element that is driven together with the movable member. 
     
     
       10. The electrostatic actuator mechanism according to  claim 1 , wherein the first and second stators include stoppers projecting from the upper surfaces of the electrode group and the electrode extending in the predetermined direction, and the movable member is provided with regions in which the stoppers are slid, the region being formed on the surfaces on which the first and second electrode sections are formed. 
     
     
       11. The electrostatic actuator mechanism according to  claim 1 , wherein the movable member includes stoppers projecting from the surfaces of the first and second electrode sections, and the first and second stators are provided with regions in which the stoppers are slid, the regions being formed on the surfaces on which the electrode group and the electrode extending in the predetermined direction are formed. 
     
     
       12. The electrostatic actuator mechanism according to  claim 1 , wherein the electrode group includes three electrodes to which voltage is applied respectively. 
     
     
       13. The electrostatic actuator mechanism according to  claim 1 , wherein the electrode group includes four electrodes to which voltage is applied respectively. 
     
     
       14. The electrostatic actuator mechanism according to  claim 4 , wherein the first and second electrode sections bear substantially the ground potential.