Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same

Abstract

Disclosed are a method for assembling a polishing while inspecting for air leakage in the polishing head and an apparatus for performing the same. By the present invention, a polishing head may be tested for air leakage at each assembly step thereof, so that the polishing head may be assembled free of air leakage, thereby reducing testing time of the polishing head, and failure of the polishing head due to air leakage may be prevented. The apparatus includes a housing supporting the polishing head and having coupling lines coupled with ends of tubes provided in the assembled polishing head, or the polishing head being assembled. A pneumatic pressure regulating section selectively supplies positive pressure or vacuum to the tubes through the coupling lines. A sensor section detects the pressure and level of vacuum in the tubes. A determining section determines if there is air leakage in the polishing head.

What is claimed is:  
     
       1. An apparatus for inspecting a polishing head for air leakage during assembly of the polishing head comprising: 
       a housing operatively associated with an upper surface of the polishing head for supporting the polishing head, the housing having first, second and third coupling lines, the polishing head having first, second and third tubes, wherein each coupling line of the housing is independently communicated with a corresponding tube of the polishing head;  
       a pneumatic pressure regulating section for selectively supplying a positive pressure or a vacuum to each of the tubes of the polishing head through the coupling lines of the housing, the pneumatic pressure regulating section including:  
       a main pressure regulating device for supplying positive pressure into the first, second and third tubes of the polishing head;  
       a main vacuum regulating device for supplying vacuum into the second and third tubes of the polishing head;  
       a first connection line connected to the main pressure regulating device for transferring positive pressure supplied from the main pressure regulating device;  
       first, second and third pressure lines branched from the first connection line and connected respectively to the first, second and third coupling lines of the housing;  
       each of the first, second and third pressure lines having a first valve for selectively opening and closing the first, second and third pressure lines;  
       a second connection line connected to the main vacuum regulating device for transferring vacuum supplied from the main vacuum regulating device;  
       first and second vacuum lines branched from the second connection line and connected respectively to the second and third coupling lines of the housing;  
       each of the first and second vacuum lines having a second valve for selectively opening and closing the first and second vacuum lines;  
       a third connection line connected to the second coupling line of the housing, and connecting the second pressure line to the first vacuum line so that the second pressure line and the first vacuum line are connected to the second coupling line of the housing; and  
       a fourth connection line connected to the third coupling line of the housing, and connecting the third pressure line to the second vacuum line so that the third pressure line and the second vacuum line are connected to the third coupling line of the housing;  
       a sensor section for detecting, measuring and generating data relating to a level of positive pressure or vacuum in each of the tubes of the polishing head; and  
       a determining section for receiving data relating to a level of positive pressure or vacuum in each of the tubes from the sensor section to ascertain whether air leakage exists in the polishing head by determining if the level of positive pressure or vacuum in each of the tubes is maintained over a predetermined period of time,  
       wherein the first, second and third tubes provided in the polishing head that are respectively communicated with the first, second and third coupling lines of the housing, are first, second and third air passages, respectively, and are respectively communicated with an inner tube, a membrane and a retainer ring of the polishing head.  
     
     
       2. The apparatus as claimed in  claim 1 , wherein the first air passage communicated with the inner tube receives only positive pressure from the pneumatic pressure regulating section. 
     
     
       3. The apparatus as claimed in  claim 1 , wherein the first pressure line is directly connected to the first coupling line of the ho sing communicated with the inner tube of the housing. 
     
     
       4. The apparatus as claimed in  claim 1 , further comprising a venting valve connected to each of the first valves and the first, second and third pressure lines to allow or prevent discharge of pressure from each of the tubes of the polishing head to an exterior. 
     
     
       5. The apparatus as claimed in  claim 1 , wherein the sensor section includes first sensors provided on each of the first valves and the first, second and third pressure lines connected to the first, second and third coupling lines of the housing to detect pressure in the first, second and third tubes of the polishing head, and second sensors provided on each of the second valves and the first and second vacuum lines connected to the second and third coupling lines of the housing to detect a level of vacuum in the second and third tubes of the polishing head. 
     
     
       6. The apparatus as claimed in  claim 5 , further comprising first control sections connected to the first sensors and the first valves for driving the first valves based on the data obtained from the first sensors in order to individually control pressure supplied to the first, second and third tubes of the polishing head. 
     
     
       7. The apparatus as claimed in claims  6 , further comprising second control sections connected to the second sensors and the second valves for driving the second valves based on the data obtained from the second sensors in order to individually control the vacuum supplied into the second and third tubes of the polishing head. 
     
     
       8. The apparatus as claimed in  claim 1 , wherein a timer is attached to each the sensors of the sensor section for notifying of a lapse of time. 
     
     
       9. An apparatus for inspecting a polishing head for air leakage during assembly of the polishing head, comprising: 
       a housing operatively associated with an upper surface of the polishing head for supporting the polishing head, the housing having first, second and third coupling lines, the polishing head having first, second and third tubes, wherein each coupling line of the housing is independently communicated with a corresponding tube of the polishing head;  
       a pneumatic pressure regulating section for selectively supplying a positive pressure or a vacuum to each of the tubes of the polishing head through the coupling lines of the housing;  
       a sensor section for detecting, measuring and generating data relating to a level of positive pressure or vacuum in each of the tubes of the polishing head;  
       a determining section for receiving data relating to a level of positive pressure or vacuum in each of the tubes from the sensor section to ascertain whether air leakage exists in the polishing head by determining if the level of positive pressure or vacuum in each of the tubes is maintained over a predetermined period of time;  
       a driving section having a rail and coupled to a predetermined side portion of the housing for moving the housing and the polishing head supported by the housing in upward and downward directions along the rail;  
       a motor connected to the housing for driving the housing along the rail; and a measuring section for measuring a driving distance of the housing.  
     
     
       10. The apparatus as claimed in  claim 9 , wherein the first, second and third tubes provided in the polishing head that are respectively communicated with the first, second and third coupling lines of the housing are first, second, and third air passages, respectively, and are respectively communicated with an inner tube, a membrane and a retainer ring of the polishing head. 
     
     
       11. The apparatus as claimed in  claim 10 , wherein the first air passage communicated with the inner tube receives only positive pressure from the pneumatic pressure regulating section. 
     
     
       12. The apparatus as claimed in  claim 10 , wherein the pneumatic pressure regulating section comprises: 
       a main pressure regulating device for supplying positive pressure into the first, second and third tubes of the polishing head;  
       a main vacuum regulating device for supplying vacuum into the second and third tubes of the polishing head;  
       a first connection line connected to the main pressure regulating device for transferring positive pressure supplied from the main pressure regulating device;  
       first, second and third pressure lines branched from the first connection line and connected respectively to the first, second and third coupling lines of the housing;  
       each of the first, second and third pressure lines having a first valve for selectively opening and closing the first, second and third pressure lines;  
       a second connection line connected to the main vacuum regulating device for transferring vacuum supplied from the main vacuum regulating device;  
       first and second vacuum lines branched from the second connection line and connected respectively to the second and third coupling lines of the housing;  
       each of the first and second vacuum lines having a second valve for selectively opening and closing the first and second vacuum lines;  
       a third connection line connected to the second coupling line of the housing, and connecting the second pressure line to the first vacuum line so that the second pressure line and the first vacuum line are connected to the second coupling line of the housing; and  
       a fourth connection line connected to the third coupling line of the housing, and connecting the third pressure line to the second vacuum line so that the third pressure line and the second vacuum line are connected to the third coupling line of the housing.  
     
     
       13. An apparatus for inspecting a polishing head for air leakage during assembly of the polishing head, comprising: 
       a housing operatively associated with an upper surface of the polishing head for supporting the polishing head, the housing having first, second and third coupling lines, the polishing head having first, second and third tubes, wherein each coupling line of the housing is independently communicated with a corresponding tube of the polishing head;  
       a pneumatic pressure regulating section for selectively supplying a positive pressure or a vacuum to each of the tubes of the polishing head through the coupling lines of the housing;  
       a sensor section for detecting, measuring and generating data relating to a level of positive pressure or vacuum in each of the tubes of the polishing head;  
       a determining section for receiving data relating to a level of positive pressure or vacuum in each of the tubes from the sensor section to ascertain whether air leakage exists in the polishing head by determining if the level of positive pressure or vacuum in each of the tubes is maintained over a predetermined period of time;  
       a seat sensor provided opposite to a bottom of the polishing head supported by the housing for detecting the pressure at each part of the bottom of the polishing head by making contact with the bottom of the polishing head; and  
       display section for displaying the pressure detected from each part of the seat sensor.