Apparatus for electrical testing of a substrate having a plurality of terminals

Abstract

According to one aspect of the invention apparatus is provided for electrical testing of a substrate having a plurality of terminals. The apparatus includes a frame, a probe card, a translation device, an alignment device, and a holder. The probe card includes a probe card backing member and a plurality of probes extending from the probe card backing member and is secured to the frame. The translation device is secured to the frame. The alignment device is located on the translation device. The holder is capable of holding a substrate and is secured to the alignment device. The alignment device is operable to cause alignment movement of the holder past the probe card so that selected ones of the terminals are brought into alignment with selected ones of the probes. The translation device is operable to cause translational movement, transverse to the alignment movement, of the alignment device with the holder towards the probe card. A respective one of the terminals is so brought into contact with a respective contact region of a respective one of the probes.

What is claimed:  
     
       1. Apparatus for electrical testing of a substrate having a plurality of first contact regions, comprising: 
       a frame;  
       a contact assembly having a plurality of second contact regions, said contact assembly being secured to the frame;  
       a translation device secured to the frame;  
       an alignment device carried by the translation device so that the translation device is mounted between the frame and the alignment device; and  
       a holder, capable of holding the substrate, secured to the alignment device, wherein:  
       (i) the alignment device is operable to cause alignment movement of the holder relative to the contact assembly so that selected ones of the first contact regions are brought into alignment with selected ones of the second contact regions; and  
       (ii) the translation device is operable to cause translation movement, transverse to the alignment movement, of the alignment device with the holder towards the contact assembly so that a respective one of the first contact regions is brought into electrical contact with a respective second contact region.  
     
     
       2. An apparatus according to  claim 1  wherein the alignment device is operable to move the holder in at least a first alignment direction and a second alignment direction transverse to the first alignment direction. 
     
     
       3. An apparatus according to  claim 2  wherein the alignment device is operable to rotate the holder about an axis transverse to a plane of the substrate. 
     
     
       4. An apparatus according to  claim 1  wherein the holder and the contact assembly are rotatable relative to one another about an axis transverse to a plane of the substrate. 
     
     
       5. An apparatus according to  claim 2  wherein the alignment device causes the alignment movement while the translation device and the contact assembly can remain stationary relative to one another in the alignment directions. 
     
     
       6. An apparatus according to  claim 1  wherein the translation device includes: 
       a translation stage on which the alignment device is located; and  
       a load applicator which is connected between the translation stage and the frame and operable to cause the translational movement of the translation stage relative to the frame.  
     
     
       7. An apparatus according to  claim 6  wherein the translation device includes: 
       at least one guide bearing; and  
       a respective guide pin in each guide bearing, one of the guide bearing and the guide pin being secured to the frame and the other being secured to the translation stage so that the guide pin slides within the guide bearing during the translational movement of the translation stage relative to the frame.  
     
     
       8. Apparatus for electrical testing of a substrate having a plurality of terminals, comprising: 
       a frame;  
       a contact assembly having a plurality of contact regions, said contact assembly being secured to the frame;  
       a translation stage secured to the frame for translational movement towards and away from the contact assembly;  
       a load applicator connected between the frame and the translation stage so that operation of the load applicator causes the translational movement of the translation stage;  
       an alignment stage carried by the translation stage for alignment movement in a direction transverse to the translational movement relative to said contact assembly;  
       a positioning actuator providing a connection between the translation stage and the alignment stage so that operation of the positioning actuator causes the alignment movement of the alignment stage; and  
       a holder, capable of holding the substrate, located on the alignment stage, wherein:  
       (i) the alignment movement causes movement of the alignment stage and the holder relative to said contact assembly so that selected ones of the contact regions are brought into alignment with selected ones of the terminals; and  
       (ii) the translational movement causes movement of the translation stage, the alignment stage and the holder towards the contact assembly so that a respective one of the contact regions is brought into contact with a respective one of the terminals.  
     
     
       9. An apparatus according to  claim 8  wherein the load applicator is a screw which, upon rotation within a thread, causes the translational movement. 
     
     
       10. An apparatus according to  claim 9  further comprising: 
       at least one guide bearing; and  
       a respective guide pin in each guide bearing, one of the guide bearing and the guide pin being secured to the frame and the other being secured to the translation stage so that the guide pin slides within the guide bearing the translational movement of the translation stage relative to the frame.  
     
     
       11. An apparatus according to  claim 8  wherein the positioning actuator includes at least one electromagnet. 
     
     
       12. An apparatus according to  claim 11  wherein the positioning actuator is part of a Sawyer motor. 
     
     
       13. An apparatus according to  claim 8  wherein the holder and the contact assembly are rotatable relative to one another, further comprising: 
       a rotation actuator which rotates the holder and the contact assembly relative to one another.  
     
     
       14. An apparatus according to  claim 13  further comprising: 
       a rotation stage on the alignment stage, the holder being located on the rotation stage and the rotation stage being rotatable relative to the alignment stage about an axis transverse to a plane of the substrate.  
     
     
       15. An apparatus according to  claim 14  wherein rotation of the rotation stage brings selected ones of the contact regions into alignment with selected ones of the terminals.