Piezoelectric actuated optical switch

Abstract

An optical switching component comprises a rotor with a reflective top surface pivotally mounted within a stator, and a piezoelectric actuator set between the rotor and the stator to move the rotor about the pivot point. A controller can also be joined to the piezoelectric actuator to effectuate actuation thereof. Two light ports can also be set proximate to the reflective top surface such that a beam of light emitted from one is reflected to the other. Multiple optical switching components can be arranged to form an optical switching device. Optical switching components and devices can be fabricated according to conventional microfabrication practices including film deposition, planarization, and photolithography techniques.

What is claimed is:  
     
       1. A method for making an optical switching component comprising: 
       providing a substrate;  
       forming a stator by defining a cavity within the substrate;  
       forming a mask layer over the stator and filling the cavity;  
       forming an opening in the mask layer;  
       forming within the opening a rotor and a pivotal connection to the stator;  
       removing the mask layer; and  
       forming a piezoelectric actuator between the stator and the rotor.  
     
     
       2. The method of  claim 1  wherein the substrate includes silicon. 
     
     
       3. The method of  claim 1  wherein defining a cavity is performed by photolithography. 
     
     
       4. The method of  claim 1  wherein the mask layer includes photoresist. 
     
     
       5. The method of  claim 1  wherein forming an opening is performed by photolithography. 
     
     
       6. The method of  claim 1  wherein removing the mask layer is performed by wet chemical etching. 
     
     
       7. The method of  claim 1  wherein forming a piezoelectric actuator is performed before forming a rotor. 
     
     
       8. The method of  claim 7  wherein forming a piezoelectric actuator is performed by a deposition process. 
     
     
       9. The method of  claim 1  wherein forming a piezoelectric actuator is performed by a mechanical process. 
     
     
       10. The method of  claim 1 , further including forming an optically reflective surface on the rotor. 
     
     
       11. The method of  claim 1 , wherein forming the piezoelectric actuator includes manufacturing the piezoelectric actuator separately and inserting the piezoelectric actuator between the stator and the rotor. 
     
     
       12. The method of  claim 1 , wherein forming the piezoelectric actuator occurs prior to removing the mask layer. 
     
     
       13. A method for making an optical switching component comprising: 
       providing a substrate;  
       forming a stator from the substrate by defining a cavity within the substrate;  
       forming a mask layer over the stator, the mask layer filling the cavity;  
       forming an opening in the mask layer;  
       forming within the opening a rotor and a pivotal connection between the rotor and the stator;  
       removing the mask layer; and  
       forming a piezoelectric actuator between the stator and the rotor.