Chuck for exposure apparatus

Abstract

The present invention is related to a chuck on which an array substrate having a plurality of cells for an IPS-LCD device is located for a light exposure process. The chuck of the present invention includes a chuck frame having a rectangular shape corresponding to a substrate; first and second lift pin holes that face to each other with respect to a horizontal center line of the chuck frame; third and fourth lift pin holes that face to each other with respect to a vertical center line of the chuck frame; and lift pins in each lift pin hole. Therefore, light reflected by the lift pin holes during the light exposure process does not affect a photo-resist formed over the substrate.

What is claimed is:  
     
       1. A chuck on which a substrate for a liquid crystal display device having a plurality of cells is disposed for a light exposure process, comprising: 
       a chuck frame having a rectangular shape corresponding to the substrate;  
       first and second lift pin holes on a horizontal center line of the chuck frame;  
       third and fourth lift pin holes on a vertical center line of the chuck frame; and lift pins in each lift pin hole.  
     
     
       2. The chuck according to  claim 1 , wherein each lift pin hole having the lift pin is located in a region corresponding to a region on the substrate between the cells of the substrate. 
     
     
       3. The chuck according to  claim 1 , further comprising vacuum adsorbers on an upper surface of the chuck frame. 
     
     
       4. The chuck according to  claim 3 , further comprising triangular protrusions supporting the substrate. 
     
     
       5. The chuck according to  claim 4 , wherein the vacuum adsorbers and the triangular protrusions have a same height. 
     
     
       6. The chuck according to  claim 5 , wherein the vacuum adsorbers and the triangular protrusions fix the substrate to the chuck. 
     
     
       7. The chuck according to  claim 3 , wherein the vacuum adsorber holds the substrate using a vacuum inhalation. 
     
     
       8. The chuck according to  claim 1 , wherein the lift pins lift up and down the substrate. 
     
     
       9. A chuck for processing a substrate for a liquid crystal display device having a plurality of cells comprising: 
       a chuck frame having a shape corresponding to a shape of the substrate;  
       a plurality of lift pins aligning with regions between the cells; and  
       a vacuum adsorber on an upper surface of the chuck frame.  
     
     
       10. The chuck according to  claim 9 , further comprising at least one protrusion corresponding to one of the cells. 
     
     
       11. The chuck according to  claim 10 , wherein the at least one protrusion has a triangular cross section. 
     
     
       12. The chuck according to  claim 9 , wherein the vacuum adsorber holds the substrate using a vacuum inhalation.