Aspherical microstructure, and method of fabricating the same

Abstract

As a method of fabricating aspherical microstructures, a protruding microstructure is formed on a substrate, an aspherical-profile forming layer is formed on the substrate and the protruding microstructure, and the aspherical-profile forming layer is hardened. An aspherical profile is formed on the protruding microstructure due to a surface tension of the aspherical-profile forming layer in the step of forming the aspherical-profile forming layer, and the aspherical profile is maintained through the step of hardening the aspherical-profile forming layer.

1. A microlens having an aspherical surface profile at a skirt portion of a protruding spherical portion, wherein the aspherical surface profile is identical to a surface profile generated by surface tension of a liquid deposited over a semispherical structure on a substrate. 
   
   
     2. An array of microlenses according to  claim 1 . 
   
   
     3. A fly-eyed array of microlenses according to  claim 1 . 
   
   
     4. A mold of an aspherical microlens having an aspherical surface profile at a skirt portion of a protruding spherical portion, wherein the aspherical surface profile is identical with a surface profile generated by surface tension of a liquid deposited over a semispherical structure.