Micro-electro-mechanical RF switch

Abstract

A microelectromechanical switch including: at least one pair of actuator electrodes; at least one input electrode and at least one output electrode for input and output, respectively, of a radio frequency signal; and a beam movable by an attraction between the at least one pair of actuator electrodes, the movable beam having at least a portion electrically connected to the at least one input electrode and to the at least one output electrode when moved by the attraction between the at least one pair of actuator electrodes to make an electrical connection between the at least one input and output electrodes; wherein the at least one pair of actuator electrodes are electrically isolated from each of the at least one input and output electrodes. The microelectromechanical switch can be configured in single or multiple-poles and/or single or multiple throws.

1. A single contact microelectromechanical switch comprising:
 a first level portion having a first electrode for input or output of a radio frequency signal, at least one first actuator electrode electrically isolated from the first electrode, and a first contact electrically cooperating with the first electrode; and  
 a second level portion having at least a portion separated from the first level portion by an air gap, the second level portion having a deflective beam capable of deflecting into the air gap, the beam having at least one second actuator electrode corresponding to the at least one first actuator electrode, the beam further having a second electrode corresponding to the first electrode for the other of the input or output of the radio frequency signal and a second contact electrically cooperating with the second electrode, the at least one second attractive electrode being electrically isolated from the second electrode;  
 wherein creation of an electrical attraction between the at least one first and second actuator electrodes causes the beam to deflect into the air gap and to provide an electrical connection between the first and second contacts and their respective first and second electrodes for allowing the input radio frequency signal to one of the first and second electrodes to be output to the other of the first and second electrodes.  
 
     
     
       2. The microelectromechanical switch of  claim 1 , wherein the at least one first actuator electrode comprises two first actuator electrodes each of which are electrically isolated from the first electrode and wherein the at least one second actuator electrode comprises two second actuator electrodes, each of the two first actuator electrodes corresponding to a respective second actuator electrode when the beam is deflected into the air gap. 
     
     
       3. The microelectromechanical switch of  claim 1 , further comprising at least one bumper arranged on the first level portion adjacent the first contact for preventing stiction between the beam and actuators between the first and second contacts when the beam is deflected into the air gap. 
     
     
       4. The microelectromechanical switch of  claim 3 , wherein the at least one bumper comprises first and second bumpers, each of which is arranged on the first level portion adjacent the first contact for preventing stiction between beam and actuators when the beam is deflected into lower air gap. 
     
     
       5. The microelectromechanical switch of  claim 1 , wherein the creation of an electrical attraction between the first and second actuator electrodes comprises means for maintaining one of the first and second actuator electrodes at a ground state and the other of the first and second actuator electrodes energized with an applied voltage. 
     
     
       6. The microelectromechanical switch of  claim 1 , wherein the beam further having a plurality of access holes formed therein for facilitating creation of the air gap. 
     
     
       7. The microelectromechanical switch of  claim 1 , wherein at least one of the first and second actuator electrodes are rectangular and wherein at least a portion of the first and second actuator electrodes correspond with each other across the air gap. 
     
     
       8. The microelectromechanical switch of  claim 7 , wherein each of the first and second actuator electrodes comprises two first and second actuator electrodes, each of which are rectangular and disposed on both sides of their corresponding first and second electrodes. 
     
     
       9. A single contact microelectromechanical switch comprising:
 at least one pair of actuator electrodes;  
 at least one input electrode and at least one output electrode for input and output, respectively, of a radio frequency signal; and  
 a beam movable by an attraction between the at least one pair of actuator electrodes, the movable beam having at least a portion electrically connected to the at least one input electrode and to the at least one output electrode when moved by the attraction between the at least one pair of actuator electrodes to make an electrical connection between the at least one input and output electrodes;  
 wherein the at least one pair of actuator electrodes are electrically isolated from each of the at least one input and output electrodes.