Electromechanical transducer with an adhesive layer and an anti-diffusion layer

Abstract

An electromechanical transducer is produced by the successive lamination of an adhesive layer, a bottom electrode, an anti-diffusion layer, a ferroelectric thin film, and a top electrode over an installation surface. The adhesive layer is formed from an alloy containing an anti-diffusion metal. The anti-diffusion layer is formed from an alloy containing the anti-diffusion metal and an adhesive metal.

1. An electromechanical transducer comprising:
 a ferroelectric thin film sandwiched between a top electrode and a bottom electrode;  
 an adhesive layer formed from an alloy containing an anti-diffusion metal and an adhesive metal, said adhesive layer being formed between said bottom electrode and a surface where said transducer is installed; and  
 an anti-diffusion layer formed from an alloy containing anti-diffusion metal and said adhesive metal, said anti-diffusion layer being formed between said bottom electrode and said ferroelectric thin film.  
 
     
     
       2. The electromechanical transducer according to  claim 1 , wherein the anti-diffusion metal contained in both said adhesive layer and said anti-diffusion layer is selected from the group consisting of iridium, rhodium, ruthenium, and osmium. 
     
     
       3. The electromechanical transducer according to  claim 1 , wherein said adhesive layer comprises an alloy of the anti-diffusion metal and a metal that constitutes said bottom electrode. 
     
     
       4. The electromechanical transducer according to  claim 1 , wherein said adhesive metal of both said adhesive layer and said anti-diffusion layer is either titanium or chromium. 
     
     
       5. The electromechanical transducer according to  claim 1 , wherein said bottom electrode of comprises platinum. 
     
     
       6. The electromechanical transducer according to  claim 1 , wherein said ferroelectric thin film is formed in a thickness of at least 1 μm. 
     
     
       7. An ink jet recording head, wherein the electromechanical transducer according to any of  claims 1  to  6  installed on a diaphragm film formed on at least one side of a pressure chamber filled with an ink. 
     
     
       8. The ink jet recording head according to  claim 7 , wherein the diaphragm film is constituted by lamination of a silicon oxide film and a zirconium oxide film. 
     
     
       9. The ink jet printer, wherein the ink jet recording head according to  claim 7  provides as an ink discharge means.