Method of manufacturing a piezoelectric/electrostrictive device

Abstract

A piezoelectric/electrostrictive (P/E) device includes a pair of mutually opposing metal thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. One or more piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. Any one of the movable section and the fixation section has mutually opposing end surfaces, and a distance between the end surfaces is not less than the axial length of the movable section.

1. A piezoelectric/electrostrictive device, comprising:
 a pair of mutually opposing thin plate sections;  
 a fixation section secured to at least one thin plate section; and  
 one or more piezoelectric/electrostrictive elements arranged on at least one of said thin plate sections,  
 wherein a projection is provided proximate a tip end of said at least one thin plate section.  
 
   
   
     2. The piezoelectric/electrostrictive device according to  claim 1 , wherein said projection is provided on each thin plate section. 
   
   
     3. The piezoelectric/electrostrictive device according to  claim 2 , wherein said projection extends substantially perpendicular to said each thin plate section. 
   
   
     4. The piezoelectric/electrostrictive device according to  claim 1 , wherein said projection extends substantially perpendicular to said at least one thin plate section. 
   
   
     5. The piezoelectric/electrostrictive device according to  claim 1 , wherein a movable section is provided at forward end portions of said pair of thin plate sections. 
   
   
     6. The piezoelectric/electrostrictive device according to  claim 5 , wherein any one of said movable section and said fixation section has mutually opposing end surfaces. 
   
   
     7. The piezoelectric/electrostrictive device according to  claim 5 , wherein any one of said movable section and said fixation section has a cutoff section and a part of said cutoff section constitutes mutually opposing end surfaces of said movable section and said fixation section. 
   
   
     8. The piezoelectric/electrostrictive device according to  claim 7 , wherein a gap is formed between said mutually opposing end surfaces. 
   
   
     9. The piezoelectric/electrostrictive device according to  claim 7 , further comprising a member interposed between and attached to at least one of said mutually opposing end surfaces, said member being formed from the same material as any one of said movable section and said fixation section, and an areal size of a surface of said member interposed between said end surfaces is substantially the same as an areal size of said end surfaces. 
   
   
     10. The piezoelectric/electrostrictive device according to  claim 7 , further comprising a plurality of members being interposed between said mutually opposing end surfaces, said plurality of members being formed from a material that is different from any one of said movable section and said fixation section, and an areal size of the surfaces of said plurality of members interposed between said end surfaces are substantially the same as an areal size of said end surfaces. 
   
   
     11. The piezoelectric/electrostrictive device according to  claim 10 , wherein at least one member of said plurality of members is an organic resin. 
   
   
     12. The piezoelectric/electrostrictive device according to  claim 5 , wherein said movable section and said fixation section are composed of a ceramic substrate integrated into one unit by sintering a ceramic green laminate and cutting of unnecessary portions. 
   
   
     13. The piezoelectric/electrostrictive device according to  claim 1 , wherein said one or more piezoelectric/electrostrictive elements each comprise a piezoelectric/electrostrictive operating portion positioned on an outer surface of said at least one thin plate section beginning at a position overlapping said fixation section and extending onto at least a portion of said at least one thin plate section. 
   
   
     14. The piezoelectric/electrostrictive device according to  claim 1 , wherein said piezoelectric/electrostrictive element is in the shape of a film, and is secured to said thin plate section by the aid of an adhesive. 
   
   
     15. The piezoelectric/electrostrictive device according to  claim 14 , wherein said piezoelectric/electrostrictive element has a piezoelectric/electrostrictive layer and a pair of electrodes formed on said piezoelectric/electrostrictive layer. 
   
   
     16. The piezoelectric/electrostrictive device according to  claim 15 , wherein said piezoelectric/electrostrictive element is constructed in a stacked form comprising a plurality of units each including said piezoelectric/electrostrictive layer and said pair of electrodes. 
   
   
     17. The piezoelectric/electrostrictive device according to  claim 1 , further comprising an adhesive securing said fixation section to said at least one thin plate section, said adhesive comprising an organic resin. 
   
   
     18. The piezoelectric/electrostrictive device according to  claim 1 , further comprising an adhesive securing said fixation section to said at least one thin plate section, said adhesive comprising a glass, brazing material, or solder. 
   
   
     19. The piezoelectric/electrostrictive device according to  claim 1 , wherein said piezoelectric/electrostrictive device has such a structure that internal residual stress, which has been generated in at least one of said thin plate section and said piezoelectric/electrostrictive element during production, is released by forming said mutually opposing end surfaces.