Capacitive dynamic quantity sensor device

Abstract

A sensor chip ( 100 ) includes comb-toothed movable electrodes ( 24 ) displaceable in a Y-direction, and comb-toothed stationary electrodes ( 30, 31, 40, 41 ) arranged to confront those movable electrodes ( 24 ), on one face side of a semiconductor substrate ( 10 ). The sensor chip ( 100 ) detects acceleration on the basis of a capacity change accompanying an acceleration application in the Y-direction between the movable electrodes ( 24 ) and the stationary electrodes ( 30, 31, 41, 42 ). The stationary electrodes ( 30, 31, 41, 42 ) are individually disposed to confront each other on one and other sides of the direction taken along the Y-direction in the individual movable electrodes ( 24 ). The individual electrode pads ( 25 a , 30 a , 31 a , 40 a , 41 a ) and the circuit chip ( 200 ) are electrically connected by bump electrodes ( 300 ) so that one face of the substrate ( 10 ) confronts the circuit chip ( 200 ).

1. A capacitive dynamic quantity sensor device comprising:
 a sensor chip including movable electrodes displaceable in a predetermined direction in accordance with application of a dynamical quantity, and stationary electrodes arranged to confront the movable electrodes, on one face side of a semiconductor substrate, to thereby detect the dynamic quantity on the basis of a capacity change accompanying the application of the dynamic quantity between the movable electrodes and the stationary electrodes; and a circuit chip for processing an output signal from the sensor chip,  
 wherein the movable electrodes are arrayed in plurality,  
 wherein the stationary electrodes are arrayed in plurality to confront the movable electrodes,  
 wherein one face of the sensor chip and the circuit chip are arranged to confront each other, and  
 wherein each of the stationary electrodes has a stationary electrode pad with a bump formed thereon to electrically connect with the circuit chip.  
 
   
   
     2. A capacitive dynamic quantity sensor device according to  claim 1 ,
 wherein the bump electrodes are connected separately and individually with the stationary electrodes disposed on one side of the direction along the predetermined direction in the movable electrodes, and  
 wherein the stationary electrodes disposed on the other side of the direction along the predetermined direction in the movable electrodes are gathered in electrically common wiring portions, with which the bump electrodes are connected.  
 
   
   
     3. A capacitive dynamic quantity sensor device according to  claim 1 ,
 wherein the movable electrodes have a comb-tooth shape along the predetermined direction,  
 wherein the stationary electrodes also have a comb-tooth shape to thereby mesh with the movable electrodes,  
 wherein the stationary electrodes are individually disposed to confront the movable electrodes on one and other sides of the direction along the predetermined direction, and  
 wherein the stationary electrodes and the movable electrodes are electrically connected with the circuit chip through bump electrodes.  
 
   
   
     4. A capacitive dynamic quantity sensor device according to  claim 1 , wherein the stationary electrodes are connected together by a wiring portion. 
   
   
     5. A capacitive dynamic quantity sensor device comprising:
 a circuit chip for processing an output signal; and  
 a sensor chip confronting the circuit chip, the circuit chip comprising: 
 a plurality of movable electrodes displaceable in a predetermined direction in accordance with application of a dynamic quantity;  
 a plurality of first stationary electrodes arranged to confront the movable electrodes on a first side of the movable electrodes; and  
 a plurality of second stationary electrodes arranged to confront the movable electrodes on a second side of the movable electrodes, wherein the first stationary electrodes and the second stationary electrodes are arranged so that a first electrical capacity induced between the first stationary electrodes and the movable electrodes is different than a second electrical capacity induced between the second stationary electrodes and the movable electrodes to thereby detect the dynamic quantity on the basis of a differential capacity change between the first and second electrical capacities accompanying the application of the dynamic quantity between the movable electrodes and the first and second stationary electrodes, wherein each of the first and second stationary electrodes has a stationary electrode pad with a bump formed thereon to electrically connect with the circuit chip.  
 
 
   
   
     6. A capacitive dynamic quantity sensor device according to  claim 1 , wherein the first stationary electrodes are connected together by a wiring portion, wherein each of the second stationary electrodes has an independent wiring portion.