Method for producing a stacked piezoelectric element

Abstract

A method for producing a stacked piezoelectric element by alternately stacking a plurality of layers of an electrode material and piezoelectric layers having an electro-mechanical energy converting function and provided with penetrating electrodes, which are obtained by forming through holes in each piezoelectric layer and filling such through holes with the electrode material, to be connected at a contact portion with a layer of the electrode material and sintering the thus stacked layers, includes a step of forming, on a first layer of the electrode material, a second layer of electrode material by printing at a peripheral area of the contact portion between the first layer of the electrode material and the penetrating electrodes.

1. A method for producing a stacked piezoelectric element by alternately stacking a plurality of layers of an electrode material and piezoelectric layers having an electro-mechanical energy converting function and provided with penetrating electrodes, which are obtained by forming through holes in each piezoelectric layer and filling such through holes with the electrode material, to be connected at a contact portion with a layer of the electrode material and sintering the thus stacked layers, comprising a step of:
 forming, on a first layer of the electrode material, a second layer of electrode material at a peripheral area of the contact portion between the first layer of the electrode material and the penetrating electrodes.  
 
   
   
     2. A method for producing a stacked piezoelectric element by alternately stacking a plurality of layers of an electrode material and piezoelectric layers having an electro-mechanical energy converting function and provided with penetrating electrodes, which are obtained by forming through holes in each piezoelectric layer and filling such through holes with the electrode material, to be connected at a contact portion with a layer of the electrode material and sintering the thus stacked layers, comprising a step of:
 forming, on a first layer of the electrode material, a second layer of electrode material, at the contact portion on a connecting surface of the penetrating electrodes and at a peripheral portion thereof.  
 
   
   
     3. A method for producing a stacked piezoelectric element by alternately stacking a plurality of layers of an electrode material and piezoelectric layers having an electro-mechanical energy converting function and provided with penetrating electrodes, which are obtained by forming through holes in each piezoelectric layer and filling such through holes with the electrode material, to be connected at a contact portion with a layer of the electrode material and sintering the thus stacked layers, comprising a step of:
 forming a second layer of electrode material which is thicker than a first layer of the electrode material on the piezoelectric layer at a peripheral portion of a contact area between two penetrating electrodes.  
 
   
   
     4. A method for producing a stacked piezoelectric element by alternately stacking a plurality of layers of an electrode material and piezoelectric layers having an electro-mechanical energy converting function and provided with penetrating electrodes, which are obtained by forming through holes in each piezoelectric layer and filling such through holes with the electrode material, to be connected at a contact portion with a layer of the electrode material and sintering the thus stacked layers, comprising a step of:
 forming a second layer of electrode material which is thicker than a first layer of the electrode material at a peripheral area of the contact portion between the first layer of the electrode material and the penetrating electrodes.