Damped control of a micromechanical device

Abstract

Device and method for a damping function to reduce undesirable mechanical transient responses to control signals. In one aspect of the present invention, the damping function may be used to reduce overshoot and oscillation when a digital micromirror is driven from a landing plate to the flat or neutral position. In another aspect of the present invention, the damping function may be used to reduce transient resonance of a digital micromirror when the micromirror is driven to a landing plate.

1. A method of operating a digital micromirror device having at least one micromirror, the method comprising:
 applying a reset voltage pulse to the micromirror, wherein the reset voltage pulse causes the micromirror to launch from a landing plate;  
 applying an offset voltage to the micromirror immediately after the reset voltage pulse, wherein the offset voltage is applied for a damping delay period, wherein the micromirror launches and is moving away from the landing plate before an expiration of the damping delay period;  
 applying a damping pulse to the micromirror immediately after the offset voltage; and  
 reapplying the offset voltage to the micromirror, whereby the damping pulse reduces oscillation of the micromirror about a neutral position.  
 
   
   
     2. The method of  claim 1 , wherein the damping pulse has the same polarity as the reset voltage pulse. 
   
   
     3. The method of  claim 1 , wherein the damping pulse has the same polarity and magnitude as the reset voltage pulse. 
   
   
     4. The method of  claim 1 , further comprising:
 loading an address state for the micromirror during the reapplying of the offset voltage; and  
 applying a bias voltage to the micromirror, wherein the micromirror assumes the address state.  
 
   
   
     5. The method of  claim 1 , wherein the reset voltage is about −26 volts and the offset voltage is about 7 volts. 
   
   
     6. The method of  claim 5 , wherein the damping pulse voltage is about −26 volts. 
   
   
     7. The method of  claim 1 , wherein the damping delay period is greater than 1 microsecond. 
   
   
     8. The method of  claim 7 , wherein the damping delay period is about 1.6 microseconds and the damping pulse is about 3.9 microseconds long. 
   
   
     9. A method of operating a digital micromirror device having at least one micromirror, the method comprising:
 applying a reset voltage pulse to the micromirror, wherein the reset voltage pulse causes the micromirror to launch from a landing plate;  
 applying an offset voltage to the micromirror immediately after the reset voltage pulse, wherein the offset voltage is applied for a damping delay period, wherein the micromirror launches and is moving away from the landing plate before an expiration of the damping delay period;  
 applying a damping pulse to the micromirror immediately after the offset voltage, wherein the damping pulse voltage is the same as the reset voltage; and  
 reapplying the offset voltage to the micromirror, whereby the damping pulse reduces oscillation of the micromirror about a neutral position.  
 
   
   
     10. The method of  claim 9 , further comprising:
 loading an address state for the micromirror during the reapplying of the offset voltage; and  
 applying a bias voltage to the micromirror, wherein the micromirror assumes the address state.  
 
   
   
     11. The method of  claim 9 , wherein the reset voltage is about −26 volts and the offset voltage is about 7 volts. 
   
   
     12. The method of  claim 9 , wherein the damping delay period is greater than 1 microsecond. 
   
   
     13. The method of  claim 12 , wherein the damping delay period is about 1.6 microseconds and the damping pulse is about 3.9 microseconds long.