Method for manufacturing polysilicon layer and method for manufacturing thin film transistor thereby

Abstract

A method for manufacturing polysilicon layer is provided. At first, a substrate is provided. An amorphous silicon layer having a second region and a first region is formed on the substrate. The first region is thicker than the second region. The amorphous silicon layer is completely melted to form a melted amorphous silicon layer having a first melted region and a second melted region. The temperature of the bottom center of the first melted region is lower than that of the second melted region and that of the top of the first melted region. The melted amorphous silicon layer is crystallized to form a polysilicon layer. The crystallization begins from the bottom center of the first melted region to the second melted region and the top of the first melted region.

1. A method for manufacturing a polysilicon layer, comprising:
 providing a substrate; 
 forming an amorphous silicon layer having a first region and a second region on the substrate, wherein the first region and the second region respectively have a first thickness and a second thickness, and the first thickness is greater than the second thickness; 
 completely melting the amorphous silicon layer to form a melted amorphous silicon layer having a first melted region and a second melted region, so that a first temperature of a bottom center of the first melted region is lower than a second temperature of a top of the first melted region and a third temperature of the second melted region; and 
 crystallizing the melted amorphous layer to form a polysilicon layer, so that the crystallization begins from the bottom center of the first melted region to the second melted region and to the top of the first melted region. 
 
   
   
     2. The method according to  claim 1 , wherein the step of forming an amorphous silicon layer comprises:
 forming a first amorphous silicon layer with the first thickness; and 
 removing part of the first amorphous silicon layer to form the amorphous silicon layer having the first region and the second region. 
 
   
   
     3. The method according to  claim 1 , wherein the step of forming an amorphous silicon layer comprises:
 forming a first amorphous silicon layer with a third thickness; 
 removing part of the first amorphous silicon layer; and 
 forming a second amorphous silicon layer with the second thickness on the substrate, so that the sum of the second thickness and the third thickness substantially equals to the first thickness. 
 
   
   
     4. The method according to  claim 1 , wherein the step of completely melting the amorphous silicon layer comprises:
 scanning the amorphous silicon layer with an excimer laser, wherein the scanning direction has an included angle with respect to the extended direction of the first region and the second region. 
 
   
   
     5. The method according to  claim 4 , wherein the included angle is about 45 degrees. 
   
   
     6. The method according to  claim 1 , further comprising forming an insulating layer on the substrate before the step of forming an amorphous silicon layer. 
   
   
     7. The method according to  claim 1 , wherein the substrate comprises a glass substrate. 
   
   
     8. A method for manufacturing a thin film transistor (TFT) comprising:
 providing a substrate; 
 forming an amorphous silicon layer having a first region and a second region on the substrate, wherein the first region and the second region respectively have a first thickness and a second thickness, and the first thickness is greater than the second thickness; 
 completely melting the amorphous silicon layer to form a melted amorphous silicon layer having a first melted region and a second melted region, so that a first temperature of a bottom center of the first melted region is lower than a second temperature of a top of the first melted region and a third temperature of the second melted region; 
 crystallizing the melted amorphous layer to form a polysilicon layer, so that the crystallization begins from the bottom center of the first melted region to the second melted region and to the top of the first melted region; 
 removing part of the polysilicon layer to form a polysilicon island; 
 doping both ends of the polysilicon island to form two heavily-doped type (N+) ohmic contact regions; 
 forming a gate insulating layer on the two N+ ohmic contact regions and the residue of the polysilicon island; 
 doping both ends of the residue of the polysilicon island to form two lightly-doped type (N−) ohmic contact regions between the N+ ohmic contact regions and a polysilicon channel region, wherein the polysilicon channel region corresponds to the first region of the amorphous silicon layer; 
 forming a gate on the gate insulating layer; 
 forming a dielectric layer to cover the gate and the gate insulating layer, wherein the dielectric layer and the gate insulating layer respectively have a first contact hole and a second contact hole to expose the two N+ ohmic contact regions; 
 forming a source and a drain on the dielectric layer corresponding to the second regions adjacent to the first region of the amorphous silicon layer, wherein the source and the drain are electrically connected to the two N+ ohmic contact regions via the first contact hole and the second contact hole, respectively; 
 forming a passivation layer on the dielectric layer to cover the source and the drain, with a third contact hole formed therein to expose part of the source or the drain; and 
 forming an electrode on the passivation layer, wherein the electrode is electrically connected to the source or the drain via the third contact hole. 
 
   
   
     9. The method according to  claim 8 , wherein the electrode is a transparent electrode or a reflective electrode. 
   
   
     10. The method according to  claim 8 , wherein the electrode comprises indium tin oxide (ITO). 
   
   
     11. The method according to  claim 8 , wherein the step of forming an amorphous silicon layer comprises:
 forming a first amorphous silicon layer with the first thickness; and 
 removing part of the first amorphous silicon layer to form the amorphous silicon layer having the first region and the second region. 
 
   
   
     12. The method according to  claim 8 , wherein the step of forming an amorphous silicon layer comprises:
 forming a first amorphous silicon layer with a third thickness; 
 removing part of the first amorphous silicon layer; and 
 forming a second amorphous silicon layer with the second thickness on the substrate, so that the sum of the second thickness and the third thickness substantially equals to the first thickness. 
 
   
   
     13. The method according to  claim 8 , wherein the step of completely melting the amorphous silicon layer comprises:
 scanning the amorphous silicon layer with an excimer laser, wherein the scanning direction has an included angle with respect to the extended direction of the first region and the second region. 
 
   
   
     14. The method according to  claim 13 , wherein the included angle is about 45 degrees. 
   
   
     15. The method according to  claim 8 , further comprising forming an insulating layer on the substrate before the step of forming an amorphous silicon layer. 
   
   
     16. The method according to  claim 8 , wherein the substrate comprises a glass substrate. 
   
   
     17. A method for crystallizing an amorphous silicon layer, the amorphous silicon layer having a first region and a second region, wherein the thickness of the first region being greater than the thickness of the second region, comprising:
 completely melting the amorphous silicon layer to form a melted amorphous silicon layer having a first melted region and a second melted region, so that a first temperature of a bottom center of the first melted region is lower than a second temperature of a top of the first melted region and a third temperature of the second melted region; and 
 crystallizing the melted amorphous silicon layer to form a polysilicon layer, so that the crystallization begins from the bottom center of the first region to the second region and to the top of the first region. 
 
   
   
     18. The method according to  claim 17 , wherein the step of completely melting the amorphous silicon layer comprises:
 scanning the amorphous silicon layer with an excimer laser, wherein the scanning direction has an included angle with respect to the extended direction of the first region and the second region. 
 
   
   
     19. The method according to  claim 18 , wherein the included angle is about 45 degrees. 
   
   
     20. The method according to  claim 17 , before the step of scanning the amorphous silicon layer with an excimer laser, further comprising:
 providing a substrate; 
 forming an insulating layer on the substrate; and 
 forming the amorphous silicon layer having the first region and the second region on the insulating layer.