Developer composition

Abstract

The present invention relates to a developer composition comprising (a) alkali metal carbonate salt; (b) alkali metal bicarbonate salt; (c) nonionic surfactant of the following formula (I): wherein, R 1 , R 2 , n, and m are define the same as the specification; and (d) nonionic surfactant of the following formula (II): wherein, R 3 , p, and q are define the same as the specification. The present invention also relates to a developer.

1. A developer composition comprising:
 (a) 0.1 to 10 parts by weight of alkali metal carbonate salt, the amount of said alkali metal carbonate salt is calculated by comparing with 100 parts by weight of water; 
 (b) 0.1 to 10 parts by weight of alkali metal bicarbonate salt, the amount of said alkali metal bicarbonate salt is calculated by comparing with 100 parts by weight of water; 
 (c) 0.1 to 20 parts by weight of nonionic surfactant of the formula (I) below: 
 
       
         
           
           
               
               
           
         
       
       wherein 
       R 1  is hydrogen or methyl; R 2  is hydrogen or methyl; n is an integer of 0 to 10; m is an integer of 4 to 20; the amount of said nonionic surfactant of the formula (I) is calculated by comparing with 100 parts by weight of water; and
 (d) 0.1 to 20 parts by weight of nonionic surfactant of the formula (II) below: 
 
       
         
           
           
               
               
           
         
       
       wherein 
       R 3  is C 1 –C 12  alkyl; p is an integer of 0 to 10; q is an integer of 4 to 20; the amount of said nonionic surfactant of the formula (II) is calculated by comparing with 100 parts or water. 
     
     
       2. The developer composition of  claim 1 , wherein said n of the formula (I) is an integer of 0 to 6; and said m of the formula (I) is an integer of 6 to 15. 
     
     
       3. The developer composition of  claim 1 , wherein said R 3  of the formula (II) is C 6 –C 12  alkyl, said p of the formula (II) is 0, and said q of the formula (II) is an integer of 4 to 20. 
     
     
       4. The developer composition of  claim 1 , wherein aid R 3  of the formula (II) is C 8 –C 9  alkyl. 
     
     
       5. The developer composition of  claim 1 , wherein said alkali metal carbonate salt is sodium carbonate or potassium carbonate. 
     
     
       6. The developer composition of  claim 1 , wherein said alkali metal bicarbonate salt is sodium bicarbonate or potassium bicarbonate. 
     
     
       7. The developer composition of  claim 1 , wherein said alkali metal carbonate salt is sodium carbonate, said alkali metal bicarbonate salt is bicarbonate, said nonionic surfactant of the formula (I) is the following compound: 
       
         
           
           
               
               
           
         
       
       and said nonionic surfactant of the formula (II) is the following compound: 
       
         
           
           
               
               
           
         
       
     
     
       8. The developer composition of  claim 1 , wherein said developer composition is suitable for the use with a photoresist composition comprising a colorant. 
     
     
       9. The developer composition of  claim 1 , wherein said developer composition is suitable for the use with a photoresist composition comprising an (meth)acrylic resin.