Manufacturing process developing method for semiconductor device

Abstract

Before a process design stage of judging whether a process flow involves any problems, items and standards of a process PAC, which is a PAC of a process necessary for development of a manufacturing process, and of an element PAC, which is a PAC of an element technology used in the process are set, while linking the process PAC and the element PAC with each other.

1. A manufacturing process designing method which is for dividing a full process necessary for designing a manufacturing process into a plurality of process modules and increasing a degree of perfection of the development in said process modules, comprising:
 a linking step of linking technical parameters of the process modules, the technical parameters of the process modules being composed of technical items and standards of the process modules with technical parameters of element technologies, the technical parameters of the element technologies being composed of technical items and standards of the element technologies used in said process modules; 
 a setting step of carrying out the linking step and setting the technical items and standards included in the technical parameters of the process modules and the technical parameters of the element technologies; 
 after the linking and setting steps, a design step of judging whether a process flow and process recipes are appropriate or not; 
 a process condition establishment step of judging, after said design step, whether said process flow and process conditions including said process recipes involve any problems in factory lines; and 
 a process completion step of judging, after said process condition establishment step, whether said process flow and said process conditions including said process recipes allow mass production in factory lines, 
 wherein a verification step of verifying whether evaluation values of said technical items included in said technical parameters set in said setting step meet respectively said standards included in said technical parameters set in said setting step is performed in said process completion step, 
 said setting step includes setting a defect density as one of said technical items included in said technical parameters and setting a standard of said defect density as one of said standards included in said technical parameters, and 
 said verification step includes verifying whether a value of said defect density meets said standard. 
 
   
   
     2. The manufacturing process designing method of  claim 1 , wherein
 said linking step includes linking a technical parameter of equipment, the technical parameter of equipment being composed of technical items and standards of manufacturing equipments used in said process modules or said element technologies, with the technical parameters of the process modules or the technical parameters of the element technologies, and 
 said setting step carries out said linking step and includes setting the technical items and standards included in the technical parameter of the equipment. 
 
   
   
     3. The manufacturing process designing method of  claim 2 , wherein
 said setting step includes setting, as standards included in the technical parameter of the equipment, standard defined based on a relationship between said technical parameter of the equipment and said technical parameters of the process modules or said technical parameters of the element technologies, instead of independent standards of said manufacturing equipment. 
 
   
   
     4. The manufacturing process designing method of  claim 1 , wherein
 a verification step of verifying whether evaluation values of said technical items included in said technical parameters set in said setting step meet respectively said standards included in said technical parameters set in said setting step is performed in said process condition establishment step. 
 
   
   
     5. The manufacturing process designing method of  claim 1 , further comprising:
 a sample evaluation step of judging, between said design step and said process condition establishment step, whether said process flow and said process conditions including said process recipes involve any problems in sample lines. 
 
   
   
     6. The manufacturing process designing method of  claim 5 , wherein
 a verification step of verifying whether evaluation values of said technical items included in said technical parameters set in said setting step meet respectively said standards included in said technical parameters set in said setting step is performed in said sample evaluation step. 
 
   
   
     7. A manufacturing process designing method which is for dividing a full process necessary for designing a manufacturing process into a plurality of process modules and increasing a degree of perfection of the development in said process modules, comprising:
 a linking step of linking technical parameters of the process modules, the technical parameters of the process modules being composed of technical items and standards of the process modules with technical parameters of element technologies, the technical parameters of the element technologies being composed of technical items and standards of the element technologies used in said process modules; 
 a setting step of carrying out the linking step and setting the technical items and standards included in the technical parameters of the process modules and the technical parameters of the element technologies; 
 after the linking and setting steps, a design step of judging whether a process flow and process recipes are appropriate or not; 
 a process condition establishment step of judging, after said design step, whether said process flow and process conditions including said process recipes involve any problems in factory lines; and 
 a process completion step of judging, after said process condition establishment step, whether said process flow and said process conditions including said process recipes allow mass production in factory lines, 
 wherein a verification step of verifying whether evaluation values of said technical items included in said technical parameters set in said setting step meet respectively said standards included in said technical parameters set in said setting step is performed in said process completion step, 
 said setting step includes setting reliability as one of said technical items included in said technical parameters and setting a standard of said reliability as one of said standards included in said technical parameters, and 
 said verification step includes verifying whether a value of said reliability meets said standard. 
 
   
   
     8. The manufacturing process designing method of  claim 7 , wherein
 said linking step includes linking a technical parameter of equipment, the technical parameter of equipment being composed of technical items and standards of manufacturing equipments used in said process modules or said element technologies, with the technical parameters of the process modules or the technical parameters of the element technologies, and 
 said setting step carries out said linking step and includes setting the technical items and standards included in the technical parameter of the equipment. 
 
   
   
     9. The manufacturing process designing method of  claim 8 , wherein
 said setting step includes setting, as standards included in the technical parameter of the equipment, standard defined based on a relationship between said technical parameter of the equipment and said technical parameters of the process modules or said technical parameters of the element technologies, instead of independent standards of said manufacturing equipment. 
 
   
   
     10. The manufacturing process designing method of  claim 7 , wherein
 a verification step of verifying whether evaluation values of said technical items included in said technical parameters set in said setting step meet respectively said standards included in said technical parameters set in said setting step is performed in said process condition establishment step. 
 
   
   
     11. The manufacturing process designing method of  claim 7 , further comprising:
 a sample evaluation step of judging, between said design step and said process condition establishment step, whether said process flow and said process conditions including said process recipes involve any problems in sample lines. 
 
   
   
     12. The manufacturing process designing method of  claim 11 , wherein
 a verification step of verifying whether evaluation values of said technical items included in said technical parameters set in said setting step meet respectively said standards included in said technical parameters set in said setting step is performed in said sample evaluation step. 
 
   
   
     13. A manufacturing process designing method which is for dividing a full process necessary for designing a manufacturing process into a plurality of process modules and increasing a degree of perfection of the development in said process modules, comprising:
 a linking step of linking technical parameters of the process modules, the technical parameters of the process modules being composed of technical items and standards of the process modules with technical parameters of element technologies, the technical parameters of the element technologies being composed of technical items and standards of the element technologies used in said process modules; 
 a setting step of carrying out the linking step and setting the technical items and standards included in the technical parameters of the process modules and the technical parameters of the element technologies; 
 after the linking and setting steps, a design step of judging whether a process flow and process recipes are appropriate or not; 
 a verification step of verifying, after said design step, whether evaluation values of said technical items included in said technical parameters set in said setting step meet respectively said standards included in said technical parameters set in said setting step; and 
 a process completion step of judging, after said design step, whether said process flow and process conditions included in said process recipes allow mass production in factory lines, 
 wherein said verification step is performed plural times between said design step and said process completion step, 
 said setting step includes setting a defect density as one of said technical items included in said technical parameters and setting a standard of said defect density as one of said standards included in said technical parameters, and 
 at least one time of verification step that is performed plural times includes verifying whether an evaluation value of said defect density meets said standard. 
 
   
   
     14. The manufacturing process designing method of  claim 13 , wherein
 said setting step includes setting a timing of performing said verification step for each of said technical items of each of said technical parameters set in said setting step. 
 
   
   
     15. The manufacturing process designing method of  claim 13 , wherein
 said linking step includes linking a technical parameter of equipment, the technical parameter of equipment being composed of technical items and standards of manufacturing equipments used in said process modules or said element technologies, with the technical parameters of the process modules or the technical parameters of the element technologies, and 
 said setting step carries out said linking step and includes setting the technical items and standards included in the technical parameter of the equipment. 
 
   
   
     16. The manufacturing process designing method of  claim 15 , wherein
 said setting step includes setting, as standards included in the technical parameter of the equipment, standard defined based on a relationship between said technical parameter of the equipment and said technical parameters of the process modules or said technical parameters of the element technologies, instead of independent standards of said manufacturing equipment. 
 
   
   
     17. A manufacturing process designing method which is for dividing a full process necessary for designing a manufacturing process into a plurality of process modules and increasing a degree of perfection of the development in said process modules, comprising:
 a linking step of linking technical parameters of the process modules, the technical parameters of the process modules being composed of technical items and standards of the process modules with technical parameters of element technologies, the technical parameters of the element technologies being composed of technical items and standards of the element technologies used in said process modules; 
 a setting step of carrying out the linking step and setting the technical items and standards included in the technical parameters of the process modules and the technical parameters of the element technologies; 
 after the linking and setting steps, a design step of judging whether a process flow and process recipes are appropriate or not; 
 a verification step of verifying, after said design step, whether evaluation values of said technical items included in said technical parameters set in said setting step meet respectively said standards included in said technical parameters set in said setting step; and 
 a process completion step of judging, after said design step, whether said process flow and process conditions included in said process recipes allow mass production in factory lines, 
 wherein said verification step is performed plural times between said design step and said process completion step, 
 said setting step includes setting reliability as one of said technical items included in said technical parameters and setting a standard of said reliability as one of said standards included in said technical parameters, and 
 at least one time of verification step that is performed plural times includes verifying whether an evaluation value of said reliability meets said standard. 
 
   
   
     18. The manufacturing process designing method of  claim 17 , wherein
 said linking step includes linking a technical parameter of equipment, the technical parameter of equipment being composed of technical items and standards of manufacturing equipments used in said process modules or said element technologies, with the technical parameters of the process modules or the technical parameters of the element technologies, and 
 said setting step carries out said linking step and includes setting the technical items and standards included in the technical parameter of the equipment. 
 
   
   
     19. The manufacturing process designing method of  claim 18 , wherein
 said setting step includes setting, as standards included in the technical parameter of the equipment, standard defined based on a relationship between said technical parameter of the equipment and said technical parameters of the process modules or said technical parameters of the element technologies, instead of independent standards of said manufacturing equipment. 
 
   
   
     20. The manufacturing process designing method of  claim 17 , wherein
 said setting step includes setting a timing of performing said verification step for each of said technical items of each of said technical parameters set in said setting step.