Liquid crystal display and method of manufacturing the same

Abstract

A method of manufacturing a liquid crystal display holding a liquid crystal layer between a picture element substrate on which a pixel electrode driven by a thin film transistor is formed and a opposed counter substrate and forming a terminal to an external driving circuit on the picture element substrate, includes forming a semiconductor layer on the substrate, forming a gate insulating film on the semiconductor layer, forming a gate electrode on the gate insulating film, forming a source-drain region in the semiconductor layer, forming a source-drain wire on the substrate, forming a terminal wire on the substrate, forming insulating inorganic films on regions of the terminal wire on the external driving circuit and a display area sides, forming an organic resin film on the insulating inorganic film, and forming a conductive film on the terminal wire. The conductive film has a predetermined distance to the organic resin film.

1. A method of manufacturing a liquid crystal display, which holds a liquid crystal layer between a picture element substrate on which a pixel electrode driven by a thin film transistor is formed and a counter substrate opposed to the picture element substrate, and which forms a terminal to be connected to an external driving circuit on at least one side of the picture element substrate, the method comprising:
 forming a semiconductor layer on the substrate; 
 forming a gate insulating film on the semiconductor layer; 
 forming a gate electrode on the gate insulating film; 
 forming a source-drain region by an ion-injecting impurity into the semiconductor layer; 
 forming a source-drain wire on the substrate; 
 forming a terminal wire on the substrate; 
 forming insulating inorganic films on a region of the terminal wire on a side of the external driving circuit and on a region thereof on a side of a display area; 
 forming an organic resin film on the insulating inorganic film; and 
 forming a conductive film on the terminal wire including at least a part of the insulating inorganic film, 
 wherein the conductive film has a predetermined distance to the organic resin film. 
 
   
   
     2. The method of manufacturing a liquid crystal display according to  claim 1 ,
 wherein the conductive film is a transparent conductive film. 
 
   
   
     3. The method of manufacturing a liquid crystal display according to  claim 1 ,
 wherein the conductive film is a laminate of a transparent conductive film and a thin metal film. 
 
   
   
     4. The method of manufacturing a liquid crystal display according to  claim 1 ,
 wherein the forming of the terminal wire is identical with the forming the source-drain wire of the thin film transistor on the picture element substrate. 
 
   
   
     5. A method of manufacturing a liquid crystal display, which holds a liquid crystal layer between a picture element substrate on which a pixel electrode driven by a thin film transistor is formed and a counter substrate opposed to the picture element substrate, and which forms a terminal to be connected to an external driving circuit on at least one side of the picture element substrate, the method comprising:
 forming a semiconductor layer on the substrate; 
 forming a gate insulating film on the semiconductor layer; 
 forming a gate electrode on the gate insulating film; 
 forming a first wire on the substrate; 
 forming an insulating interlayer film on the first wire; 
 forming in the insulating interlayer film an opening communicating with the first wire; 
 filling an interior of the opening with a conductor; 
 forming a second wire on the insulating interlayer film including the opening; and 
 forming a transparent conductive film on the second wire, 
 wherein the second wire and transparent conductive film have a predetermined distance to a protective film formed on a display area on the picture element substrate, and 
 the first wire and second wire are connected together via the conductor in the opening. 
 
   
   
     6. The method of manufacturing a liquid crystal display according to  claim 5 ,
 wherein the forming of the first wire is identical with the forming the gate electrode of the thin film transistor on the picture element substrate. 
 
   
   
     7. A liquid crystal display comprising:
 a picture element substrate on which a thin film transistor and a pixel electrode driven by the thin film transistor are formed; 
 a counter substrate opposed to the picture element substrate; and 
 a liquid crystal layer held between the picture element substrate and the counter substrate, 
 wherein the picture element substrate is provided on at least one side thereof with a terminal to be connected to an external driving circuit, 
 the terminal includes a terminal wire and a conductive film on the terminal wire, 
 a surface of a region of the terminal wire on a side of the outer driving circuit and a surface of a region thereof on a side of a display panel are covered with a protective film made of a laminate of an insulating inorganic film and an organic resin film, 
 the conductive film is formed on the terminal wire including at least a part of the insulating inorganic film, and 
 the conductive film has a predetermined distance to the organic resin film. 
 
   
   
     8. The liquid crystal display according to  claim 7 ,
 wherein the conductive film is made of a transparent conductive film. 
 
   
   
     9. The liquid crystal display according to  claim 7 ,
 wherein the conductive layer is made of a laminate of a transparent conductive film and a thin metal film. 
 
   
   
     10. A liquid crystal display comprising:
 a picture element substrate on which a thin film transistor and a pixel electrode driven by the thin film transistor are formed; 
 a counter substrate opposed to the picture element substrate; and 
 a liquid crystal layer held between the picture element substrate and the counter substrate, 
 wherein the picture element substrate includes on at least one side thereof a terminal to be connected to an external driving circuit, and a first wire to input a signal from the external driving circuit to a display panel side via the terminal, 
 the terminal has a second wire and a transparent conductive film formed on the second wire, 
 the transparent conductive film has a predetermined distance to a protective film formed on a display area on the picture element substrate, and 
 the first wire and the second wire are connected together via an opening.