US7351449B2ExpiredUtilityA1

Chemical vapor deposition methods for making powders and coatings, and coatings made using these methods

86
Assignee: GIMAT CO NPriority: Sep 22, 2000Filed: Dec 21, 2000Granted: Apr 1, 2008
Est. expirySep 22, 2020(expired)· nominal 20-yr term from priority
Inventors:Andrew Tye HuntGirish Nilkanth DeshpandeTzyy Jiuan HwangNii Sowa LayeMiodrag OljacaSubramaniam ShanmughamShara S. ShoupTrifon TomovWilliam J. DalzellAimee PodaMichelle Hendrick
C23C 16/453Y10T428/31786C23C 16/45587Y10T428/31507Y10T428/31598
86
PatentIndex Score
41
Cited by
11
References
37
Claims

Abstract

Flame produced vapors for combustion chemical vapor deposition are redirected from the direction of the flame by differential atmospheric pressure, such as positive pressure provided by a blower or negative pressure provided by a vacuum. This allows, for example, lower surface temperatures of substrates being coated with flame-produced vapors and coating of interior surfaces.

Claims

exact text as granted — not AI-modified
1. A method of forming a material, said method comprising:
 (a) providing at least one energy source derived from a chemical reaction(s), said at least one energy source being the predominant source of energy for said method; 
 (b) feeding a precursor material along a first path into a localized environment of the at least one energy source under conditions tat said energy source causes combustion of at least one component of said precursor material to produce combustion products that continue along said first path; and 
 (c) providing at least one redirecting gas flow source and applying the at least one redirecting gas flow to the first path combustion products, to thereby redirect the combustion products from the first path to a redirected path at an angle relative to said first path, to thereby cause the combustion products to contact a surface and form at least part of the material. 
 
     
     
       2. The method of  claim 1 , wherein causing the combustion products to contact a surface includes contacting a substrate to form a coating of the material thereon. 
     
     
       3. The method of  claim 2 , wherein die coating is formed less than 5 microns in thickness. 
     
     
       4. The method of  claim 2 , wherein the coating is formed less than 0.5 microns in thickness. 
     
     
       5. The method of  claim 1 , wherein the localized environment is within 20 cm of the energy source. 
     
     
       6. The method of  claim 1 , wherein the localized environment is within 10 cm of the energy source. 
     
     
       7. The method of  claim 1 , wherein the localized environment is within 5 cm of the energy source. 
     
     
       8. The method of  claim 1 , wherein the localized environment is within 2 cm of the energy source. 
     
     
       9. The method of  claim 1  further including a second energy source to promote said chemical reaction(s). 
     
     
       10. The method of  claim 1  wherein said material forms a coating on said surface. 
     
     
       11. The method of  claim 10  wherein the coating is less than 5 microns in thickness. 
     
     
       12. The method of  claim 10  wherein the coating is less than 0.5 micron in thickness. 
     
     
       13. A method of forming a material, said method comprising:
 (a) providing at least one energy derived from a chemical reaction(s), said at least one energy source being the predominant source of energy for said method; 
 (b) providing a liquid precursor material; 
 (c) feeding a liquid precursor material into a localized environment of the at least one energy source under conditions that said energy source causes combustion of at least one component of said precursor material to produce combustion; 
 (d) directing the combustion products along a first path; and 
 (e) providing at least one source of pressure differential and applying the at least one source of pressure differential to the localized environment of the at least one energy source, such that the localized environment is selectively changed to redirect the combustion products from the first path to a redirected path at an angle relative to said first path, to thereby cause the combustion products to contact a surface and form at least part of the material. 
 
     
     
       14. The method of  claim 13 , wherein applying to the localized environment the at least one source of pressure differential includes diluting combustion product gasses by at least 10%. 
     
     
       15. The method of  claim 13 , wherein applying to the localized environment the at least one source of pressure differential includes diluting combustion product gasses by at least 30%. 
     
     
       16. The method of  claim 13 , wherein applying to the localized environment the at least one source of pressure differential includes diluting combustion product gasses by at least 60%. 
     
     
       17. The method of  claim 13 , wherein applying to the localized environment the at least one source of pressure differential includes diluting combustion product gasses by at least 100%. 
     
     
       18. The method of  claim 13 , wherein the change to the localized environment caused by providing the at least one source of pressure differential includes cooling combustion product gasses by at least 10% compared to the temperature of the energy source relative to the temperature of the surface. 
     
     
       19. The method of  claim 13 , wherein the change to the localized environment caused by providing the at least one source of pressure differential includes cooling combustion product gasses by at least 25% compared to the temperature of the energy source relative to the temperature of the surface. 
     
     
       20. The method of  claim 13 , wherein the change to the localized environment caused by providing the at least one source of pressure differential includes cooling combustion product gasses by at least 50% compared to the temperature of the energy source relative to the temperature of the surface. 
     
     
       21. The method of  claim 13 , wherein the change to the localized environment caused by providing the at least one source of pressure differential includes cooling combustion product gasses by at least 70% compared to the temperature of the energy source relative to the temperature of the surface. 
     
     
       22. The method of  claim 13 , wherein the localized environment comprises a pressurized environment having any pressure between 1-10,000 torr. 
     
     
       23. A method of forming a material, said method comprising:
 (a) providing at least one energy source derived from a chemical reaction(s), said at least one energy source being the predominant source of energy for said method; 
 (b) feeding a precursor material into a localized environment of the at least one energy source under conditions that said energy source causes combustion of at least one component of said precursor material to produce combustion products,; 
 (c) directing the combustion products along a first path; and 
 (d) providing at least one source of pressure differential and applying the at least one source of pressure differential to the localized environment of the at least one energy source, such tat the localized environment is selectively changed to redirect the combustion products from the first path to a redirected path at an angle relative to said first path, to thereby cause the gasses combustion products to contact a surface and form at least part of the material in an atmospheric environment. 
 
     
     
       24. A method of forming a material, said method comprising:
 (a) providing at least one energy source derived from a chemical reaction(s), said at least one energy source being the predominant source of energy for said method; 
 (b) feeding a precursor material within gasses, the gasses including liquid that is at least partially vaporized, into a localized environment of the at least one energy source, to allow the at least one energy source to cause combustion of the precursor material and/or the gasses and thereby produce combustion products; 
 (c) directing the combustion products along a first path; and 
 (d) providing at least one source of pressure differential and applying the at least one source of pressure differential to the localized environment of the at least one energy source, such that the localized environment is selectively changed to redirect the combustion products from the first path to a redirected path at an angle relative to said first path, to thereby cause the combustion products to contact a surface and form at least part of the material. 
 
     
     
       25. The method of  claim 24 , wherein the localized environment comprises a pressurized environment having any pressure between 1-10,000 torr. 
     
     
       26. A method of forming a material, said method comprising:
 (a) providing at least one combustion source derived from a chemical reaction(s), said at least one energy source being the predominant source of energy for said method; 
 (b) feeding a precursor material into a localized environment of the at least one combustion source, to allow the at least one combustion source to activate the precursor material within gasses and thereby produce combustion products; 
 (c) directing the combustion products along a first path; and 
 (d) providing at least one source of pressure differential and applying the at least one source of pressure differential to the localized environment of the at least one combustion source, such that the localized environment is selectively changed to redirect the combustion products from the first path to a redirected path at an angle relative to said first path, to thereby cause the combustion products to contact a surface and form at least part of the material. 
 
     
     
       27. The method of  claim 26  wherein providing at least one source of pressure differential comprises providing at least one source of pressurized fluid. 
     
     
       28. The method of  claim 27  wherein the pressurized fluid is a gas. 
     
     
       29. The method of  claim 28  wherein the pressurized gas is directed close to, but not directly at the at least one combustion source, thereby forming the pressure differential that redirects the combustion products toward the surface. 
     
     
       30. The method of  claim 28  wherein the pressurized gas intercepts the gas flow out of the at least one combustion source, thereby redirecting the combustion products toward the surface. 
     
     
       31. The method of  claim 27  wherein the pressurized fluid contains a liquid. 
     
     
       32. The method of  claim 27  wherein:
 (a) the pressurized fluid comprises an additional precursor; and 
 (b) the combustion source causes the additional precursor to react to create additional combustion products that form at least part of the material. 
 
     
     
       33. The method of  claim 27  wherein:
 (a) the pressurized fluid comprises additional material; and 
 (b) the additional material forms at least part of the formed material. 
 
     
     
       34. The method of  claim 26  wherein the at least one source of pressure differential includes at least one source of vacuum. 
     
     
       35. The method of  claim 26  wherein the at least one source of pressure differential includes at least two sources of pressure differential. 
     
     
       36. The method of  claim 35  wherein the at least two sources of pressure differential includes at least one source of vacuum and at least one source of pressurized fluid. 
     
     
       37. The method of  claim 26 , wherein the localized environment comprises a pressurized environment having any pressure between 1-10,000 torr.

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