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US7400413B2ActiveUtilityPatentIndex 83

Three-dimensional shape measuring apparatus using shadow moire

Assignee: KOH YOUNG TECH INCPriority: Nov 13, 2006Filed: Mar 20, 2007Granted: Jul 15, 2008
Est. expiryNov 13, 2026(~0.4 yrs left)· nominal 20-yr term from priority
Inventors:JEON MOON-YOUNGYUN SANG-KYU
G01B 11/25G01N 2021/456G01B 11/2433G01N 21/45G02B 27/60
83
PatentIndex Score
9
Cited by
7
References
10
Claims

Abstract

A 3D shape measuring apparatus using a shadow moire, which can measure a 3D shape of a test object by selectively switching on/off a plurality of illuminating parts irrespective of a form of the test object is provided. The 3D shape measuring apparatus using the shadow moire includes a grating 110 , a grating moving part 120 , a beam splitter part 130 being provided above the grating 110 to direct a first light source towards the grating 110 or pass a reflected image of a test object 102 reflected via the grating 110 , a subsidiary illuminating part 140 being provided on one surface of the beam splitter part 130 to emit the first light towards the beam splitter part 130 , an image sensor 150 being provided above the beam splitter part 130 to take the reflected image having passed through the beam splitter part 130 , a plurality of illuminating parts 160 being inclined a predetermined angle of the viewing axis of the image sensor 140 to be positioned above the grating 110 and to be spaced apart from each other with an equivalent angle and emit a second light towards the grating 110 , and a control part 170 controlling the grating moving part 120 , the subsidiary illuminating part 140 , the image sensor 150 , and the plurality of illuminating parts 160 , and thereby, transferring the image which is captured by the image sensor 150 , in order to calculate a 3D shape of the test object 102 , and controlling the plurality of illuminating parts 160 to be selectively switched on/off according to a shape of the test object 102.

Claims

exact text as granted — not AI-modified
1. A 3-dimensional (3D) shape measuring apparatus using a shadow moire comprising:
 a grating moving part comprising a grating moving member which is installed with a grating, a grating moving actuator which connects with the grating moving member and moves the grating moving member, and a linear guide which guides the grating moving actuator; 
 a beam splitter part being provided above the grating moving part, and comprising a filter, a lens, and a beam splitter; 
 a subsidiary illuminating part being provided on one side of the beam splitter part to emit a light towards the beam splitter part; 
 an image sensor receiving taking a reflected image passed through the beam splitter part; 
 a plurality of illuminating parts being inclined at a predetermined angle of the viewing axis of the image sensor, each of the plurality of illuminating parts comprising a light source, a lens, and a filter; the plurality of illuminating parts being selectively operable to simultaneously illuminate the grating; and 
 a control part controlling the grating moving part, the subsidiary illuminating part, the image sensor, and the plurality of illuminating parts, and thereby, transferring the image which is received by the image sensor, in order to calculate a 3D shape of a test object, and controlling the plurality of illuminating parts to be selectively switched on/off according to a shape of the test object. 
 
   
   
     2. The apparatus of  claim 1 , wherein the subsidiary illuminating part comprises:
 a light source generating a light; 
 a lens disposed on one side of the light source to pass the light generated from the light source; and 
 a filter disposed on one side of the lens to filter the light having passed through the lens and direct the filtered light towards the beam splitter part. 
 
   
   
     3. A 3-dimensional (3D) shape measuring apparatus using a shadow moire comprising:
 a grating moving part comprising a grating moving member which is installed with a grating, a grating moving actuator which connects with the grating moving member and moves the grating moving member, and a linear guide which guides the grating moving actuator; 
 a beam splitter part being provided above the grating moving part; 
 a subsidiary illuminating part being provided on one side of the beam splitter part to emit a light towards the beam splitter part; 
 an image sensor receiving a reflected image passed through the beam splitter part; 
 a plurality of illuminating parts being inclined at a predetermined angle of the viewing axis of the image sensor, each of the plurality of illuminating parts comprising a light source, a lens, and a filter; and 
 a control part controlling the grating moving part, the subsidiary illuminating part, the image sensor, and the plurality of illuminating parts, and thereby, transferring the image which is received by the image sensor, in order to calculate a 3D shape of a test object, and controlling the plurality of illuminating parts to be selectively switched on/off according to a shape of the test object; wherein the beam splitter part comprises: 
 a filter disposed above the grating to filter light emitted via the subsidiary illuminating part and direct the filtered light towards the grating or filter a reflected image of the test object; 
 a lens disposed above the filter to direct light towards the filter or pass the reflected image filtered via the filter; and 
 a beam splitter disposed above the lens to reflect the light emitted via the subsidiary illuminating part or pass the reflected image passed through the lens. 
 
   
   
     4. A 3D shape measuring apparatus using a shadow moire comprising:
 a grating moving part comprising a grating moving member which is installed with a grating, a grating moving actuator which connects with the grating moving member and moves the grating moving member, and a linear guide which guides the grating moving actuator; 
 a beam splitter part being provided above the grating moving part, and comprising a filter, a lens, and a beam splitter; 
 a subsidiary illuminating part being provided on one side of the beam splitter part to emit a light towards the beam splitter part; 
 an image sensor receiving a reflected image passed through the beam splitter part; 
 a plurality of illuminating parts being horizontally provided, each of the plurality of illuminating parts comprising a light source to emit a light, a lens, a filter, and an inclined mirror to reflect the light having passed though the filter towards the grating; said plurality of illuminating parts being selectively operable to simultaneously illuminate the grating; and 
 a control part controlling the grating moving part, the subsidiary illuminating part, the image sensor, and the plurality of illuminating parts, and thereby, transferring the image-which is received by the image sensor, in order to calculate a 3D shape of a test object, and controlling the plurality of illuminating parts to be selectively switched on/off according to a shape of the test object. 
 
   
   
     5. A 3D shape measuring apparatus using a shadow moire comprising:
 a grating being placed above a work stage, whereby said work stage moves a test object to a measuring location; 
 a grating moving part which is installed with the grating to move the grating; 
 a beam splitter part being provided above the grating to direct a light towards the grating or pass a reflected image of the test object; 
 a subsidiary illuminating part being provided on one side of the beam splitter part to emit light towards the beam splitter part; 
 an image sensor being provided above the beam splitter part to receive the reflected image having passed through the beam splitter part; 
 a plurality of illuminating parts being inclined at a predetermined angle of the viewing axis of the image sensor to be positioned above the grating and to be spaced apart from each other with an equivalent angle and emit a light towards the grating; the plurality of illuminating parts selectively operable to simultaneously illuminate the grating; and 
 a control part controlling the grating moving part, the subsidiary illuminating part, the image sensor, and the plurality of illuminating parts, and thereby, transferring the image which is captured by the image sensor, in order to calculate a 3D shape of the test object, and controlling the plurality of illuminating parts to be selectively switched on/off according to a shape of the test object. 
 
   
   
     6. The apparatus of  claim 5 , wherein the grating moving part comprises:
 a grating moving member provided with a through hole and includes the grating on a bottom surface; 
 a grating moving actuator which connects with and moves the grating moving member; and 
 a linear guide disposed on each end of the grating moving member and guides the grating moving member when the grating moving actuator moves the grating moving member. 
 
   
   
     7. The apparatus of  claim 5 , wherein the subsidiary illuminating part comprises:
 a light source generating a light; 
 a lens disposed on one side of the light source to pass the light generated from the light source; and 
 a filter disposed on one side of the first lens to filter the light having passed through the lens and direct the filtered light towards the beam splitter part. 
 
   
   
     8. The apparatus of  claim 5 , wherein the plurality of illuminating parts is disposed in four directions around the test object respectively, and each of the plurality of illuminating parts comprises:
 a light source generating a light; 
 a lens disposed below the light source to pass the light generated from the light source; and 
 a filter disposed below the lens to filter the light having passed through the lens and direct the filtered light towards the grating. 
 
   
   
     9. The apparatus of  claim 5  or  8 , wherein each of the plurality of illuminating parts further includes a mirror which is provided to be inclined on one side of the filter to direct the light generated from each of the plurality of illuminating parts towards the grating. 
   
   
     10. A 3D shape measuring apparatus using a shadow moire comprising:
 a grating being placed above a work stage, whereby said work stage moves a test object to a measuring location; 
 a grating moving part which is installed with the grating to move the grating; 
 a beam splitter part being provided above the grating to direct a light towards the grating or pass a reflected image of the test object; 
 a subsidiary illuminating part being provided on one side of the beam splitter part to emit a light towards the beam splitter part; 
 an image sensor being provided above the beam splitter part to receive the reflected image having passed through the beam splitter part; 
 a plurality of illuminating parts being inclined at a predetermined angle of the viewing axis of the image sensor to be positioned above the grating and to be spaced apart from each other with an equivalent angle and emit a light towards the grating; and 
 a control part controlling the grating moving part, the subsidiary illuminating part, the image sensor, and the plurality of illuminating parts, and thereby, transferring the image which is captured by the image sensor, in order to calculate a 3D shape of the test object, and controlling the plurality of illuminating parts to be selectively switched on/off according to a shape of the test object; 
 
     wherein the beam splitter part comprises:
 a filter disposed above the grating to filter the light emitted via the subsidiary illuminating part and direct the filtered light towards the grating or filter the reflected image of the test object; 
 a lens disposed on the filter to direct the light via the filter or pass the reflected image filtered via the filter; and 
 a beam splitter disposed above the lens to reflect the light emitted via the subsidiary illuminating part or pass the reflected image having passed through the lens.

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