Variable focal length lens and lens array comprising discretely controlled micromirrors

Abstract

A discretely controlled micromirror array lens (DCMAL) consists of many discretely controlled micromirrors (DCMs) and actuating components. The actuating components control the positions of DCMs electrostatically. The optical efficiency of the DCMAL is increased by locating a mechanical structure upholding DCMs and the actuating components under DCMs to increase an effective reflective area. The known microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberrations by controlling DCMs independently. Independent control of each DCM is possible by known microelectronics technologies. The DCM array can also form a lens with arbitrary shape and/or size, or a lens array comprising the lenses with arbitrary shape and/or size.

1. A variable focal length Micromirror Array Lens comprising:
 a) a plurality of Segmented Electrode Discretely Controlled Micromirrors (SEDCMs) are mounted in side-by-side array to define the Micromirror Array Lens; and 
 b) a plurality of segmented electrodes; 
 wherein each of the micromirror has rotational degree of freedom and translational degree of freedom motion by combinations of segmented electrodes with different areas, positions, and discrete voltages, wherein the translational degree of freedom motion of the micromirror is controlled to retract or elevate to lengthen or shorten optical path of an image reflected to satisfy phase matching condition of the Micromirror Array Lens. 
 
     
     
       2. The lens of  claim 1 , wherein the each micromirror of the variable focal length Micromirror Array Lens can have different displacements each other with digital voltage. 
     
     
       3. The lens of  claim 1 , wherein the rotation of the SEDCM is controlled. 
     
     
       4. The lens of  claim 1 , wherein the translation of the SEDCM is controlled. 
     
     
       5. The lens of  claim 1 , wherein the rotation and translation of the SEDCM are controlled. 
     
     
       6. The lens of  claim 1 , wherein two degrees of freedom rotation of the SEDCM is controlled. 
     
     
       7. The lens of  claim 1 , wherein two degrees of freedom rotation and one degree of freedom translation of the SEDCM are controlled. 
     
     
       8. The lens of  claim 1 , wherein the SEDCMs are controlled independently. 
     
     
       9. The lens of  claim 1 , wherein the SEDCM is actuated by electrostatic force. 
     
     
       10. The lens of  claim 1 , wherein the SEDCMs are arranged to form one or more concentric circles to form the Micromirror Array Lens. 
     
     
       11. The lens of  claim 10 , wherein the SEDCMs on same concentric circles are controlled by the same electrodes. 
     
     
       12. The lens of  claim 1 , wherein a control circuitry is provided under the micromirrors, wherein the control circuitry is made with microelectronics fabrication technologies. 
     
     
       13. The lens of  claim 1 , wherein the reflective surface of the SEDCM is substantially flat. 
     
     
       14. The lens of  claim 1 , wherein the reflective surface of the SEDCM has a curvature. 
     
     
       15. The lens of  claim 1 , wherein curvature of the SEDCM is controlled. 
     
     
       16. The lens of  claim 15 , wherein the curvature of the SEDCM is controlled by electrothermal force. 
     
     
       17. The lens of  claim 15 , wherein the curvature of the SEDCM is controlled by electrostatic force. 
     
     
       18. The lens of  claim 1 , wherein the SEDCM has a fan shape. 
     
     
       19. The lens of  claim 1 , wherein the SEDCM has a hexagonal shape. 
     
     
       20. The lens of  claim 1 , wherein the SEDCM has a rectangular shape. 
     
     
       21. The lens of  claim 1 , wherein the SEDCM has a square shape. 
     
     
       22. The lens of  claim 1 , wherein the SEDCM has a triangular shape. 
     
     
       23. The lens of  claim 1 , wherein the lens has an arbitrary size and/or shape. 
     
     
       24. The lens of  claim 1 , wherein all SEDCMs are arranged in a flat plane. 
     
     
       25. The lens of  claim 1 , wherein the surface material of the SEDCM is the one with high reflectivity. 
     
     
       26. The lens of  claim 1 , wherein the surface material of the SEDCM is metal. 
     
     
       27. The lens of  claim 1 , wherein the surface material of the SEDCM is metal compound. 
     
     
       28. The lens of  claim 1 , wherein the surface of the SEDCM is made by multi-layered dielectric coating. 
     
     
       29. The lens of  claim 1 , wherein a mechanical structure upholding the micromirror and actuating components are located under the micromirror. 
     
     
       30. The lens of  claim 1 , wherein the lens is an adaptive optical component, wherein the lens compensates for phase errors of light due to the medium between an object and its image. 
     
     
       31. The lens of  claim 1 , wherein the lens is an adaptive optical component, wherein the lens corrects aberrations. 
     
     
       32. The lens of  claim 1 , wherein the lens is an adaptive optical component, wherein the lens corrects the defects of an imaging system that cause the image to deviate from the rules of paraxial imagery. 
     
     
       33. The lens of  claim 1 , wherein the, lens is controlled to satisfy the same phase condition for each wavelength of Red, Green, and Blue (RGB), respectively, to get a color image. 
     
     
       34. The lens of  claim 1 , wherein the lens is controlled to satisfy the same phase condition for one wavelength among Red, Green, and Blue (RGB) to get a color image. 
     
     
       35. The lens of  claim 1 , wherein the same phase condition for color imaging is satisfied by using the least common multiple of wavelengths of Red, Green, and Blue lights as an effective wavelength for the phase condition. 
     
     
       36. The lens of  claim 1 , wherein the lens is an adaptive optical component, wherein an object which does not lie on the optical axis can be imaged by the lens without macroscopic mechanical movement. 
     
     
       37. An array of variable focal length Micromirror Array Lenses comprising a plurality of variable focal length Micromirror Array Lenses, wherein each Micromirror Array Lens comprises:
 a) a plurality of Segmented Electrode Discretely Controlled Micromirror (SEDCMs) are mounted in side-by-side array to define the Micromirror Array Lens; and 
 b) a plurality of segmented electrodes; 
 wherein each of the micromirror has rotational degree of freedom and translational degree of freedom motion by combinations of segmented electrodes with different areas, positions, and discrete voltages, wherein the translational degree of freedom motion of the micromirror is controlled to retract or elevate to lengthen or shorten optical path of an image reflected to satisfy phase matching condition of the Micromirror Array Lens.