Optical deflector and optical instrument using the same

Abstract

An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.

1. An optical deflector, comprising:
 an oscillating system; and 
 a driving system configured to drive said oscillating system; 
 wherein said oscillating system includes a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, 
 wherein said first oscillator includes a first movable element having a light deflecting element configured to deflect light, 
 wherein said second oscillator includes a second movable element having a mass adjusting member configured to adjust a mass, 
 wherein said first movable element is resiliently supported by said second movable element through said first torsion spring, for torsional oscillation about an oscillation axis, 
 wherein said second movable element is resiliently supported by said supporting member through said second torsional spring, for torsional oscillation about the oscillation axis, and 
 wherein said oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis. 
 
   
   
     2. An optical deflector according to  claim 1 , wherein said second oscillator is provided by said second movable element having said mass adjusting member and a magnet, and wherein said magnet and said mass adjusting member are disposed sandwiching the oscillation axis therebetween. 
   
   
     3. An optical deflector according to  claim 1 , wherein said second oscillator having said mass adjusting member, a magnet and said second movable element, has a gravity center aligned with the oscillation axis. 
   
   
     4. An optical deflector according to  claim 1 , wherein said oscillating system has natural oscillation modes of two different frequencies, one frequency being approximately double or triple the other frequency. 
   
   
     5. An optical deflector according to  claim 1 , wherein an interspace is defined between said second movable element and said mass adjusting member. 
   
   
     6. A method of producing an optical deflector as recited in  claim 1 , comprising:
 a step of projecting laser light to said mass adjusting member to remove a portion of said mass adjusting member. 
 
   
   
     7. An optical instrument, comprising:
 a light source; 
 an optical deflector as recited in  claim 1 ; and 
 one of a photosensitive member and an image display member; 
 wherein said optical deflector is configured to deflect light from said light source and to direct at least a portion of the deflected light onto said photosensitive member or image display member.