Hybrid waveguide sensor

Abstract

A hybrid waveguide sensor comprises a dielectric layer having one optical signal input section formed in one end thereof and one optical signal output section formed in the other end thereof, the dielectric layer having a predetermined size of thin metal film provided therein; a polymer layer formed on and under the dielectric layer and having an opening formed to expose a portion of the dielectric layer corresponding to the thin metal film, the opening having a larger width than the thin metal film; and a receptor layer formed on a portion of the dielectric layer corresponding to the thin metal film exposed by the opening.

1. A hybrid waveguide sensor comprising:
 a dielectric layer having one optical signal input section formed in one end thereof and one optical signal output section formed in the other end thereof, the dielectric layer having a predetermined size of thin metal film provided therein; 
 a polymer layer formed on and under the dielectric layer and having an opening formed to expose a portion of the dielectric layer corresponding to the thin metal film, the opening having a larger width than the thin metal film; and 
 a receptor layer formed on a portion of the dielectric layer corresponding to the thin metal film exposed by the opening. 
 
     
     
       2. The hybrid waveguide sensor according to  claim 1 ,
 wherein the dielectric layer has a protrusion formed on the upper surface thereof, the protrusion being formed in a straight line which connects the optical signal input section as one end of the dielectric layer and the optical signal output section as the other end thereof. 
 
     
     
       3. The hybrid waveguide sensor according to  claim 2 ,
 wherein the protrusion passes over the thin metal film. 
 
     
     
       4. The hybrid waveguide sensor according to  claim 1 ,
 wherein the dielectric layer has a protrusion formed on the upper surface thereof, the protrusion formed in one line at the optical signal input section as one end of the dielectric layer diverges into two lines at a predetermined position to thereby form first and second arms, and the first and second arms join each other at a predetermined position such so as to form one line at the optical signal output section. 
 
     
     
       5. The hybrid waveguide sensor according to  claim 4 ,
 wherein the first arm of the protrusion passes over the thin metal film. 
 
     
     
       6. The hybrid waveguide sensor according to  claim 1 ,
 wherein in the thin metal film, light is transmitted along the surface thereof as surface plasmon polariton modes. 
 
     
     
       7. A hybrid waveguide sensor comprising:
 a dielectric layer having one optical signal input section formed in one end thereof and one optical signal output section formed in the other end thereof, the dielectric layer having predetermined sizes of first and second thin metal films disposed therein so as to be spaced at a predetermined distance; 
 a polymer layer formed on and under the dielectric layer and having first and second openings formed to expose portions of the dielectric layer corresponding to the first and second thin metal films, respectively, the first and second openings having a larger width than the first and second thin metal films; and 
 a receptor layer formed on a portion of the dielectric layer corresponding to the first thin metal film exposed by the first opening. 
 
     
     
       8. The hybrid waveguide sensor according to  claim 7 ,
 wherein the dielectric layer has a protrusion formed on the upper surface, the protrusion formed in one line at the optical signal input section as one end of the dielectric layer diverges into two lines at a predetermined position to thereby form first and second arms, and the first and second arms join each other at a predetermined position so as to form one line at the optical signal output section. 
 
     
     
       9. The hybrid waveguide sensor according to  claim 8 ,
 wherein the first arm of the protrusion passes over the first thin metal film, and the second arm of the protrusion passes over the second thin metal film. 
 
     
     
       10. A hybrid waveguide sensor comprising:
 a dielectric layer having one optical signal input section formed in one end thereof and three of first to third optical signal output sections formed in the other end thereof, the dielectric layer having a predetermined size of thin metal film provided therein; 
 a polymer layer formed on and under the dielectric layer and having an opening formed to expose a portion of the dielectric layer corresponding to the thin metal film, the opening having a larger width than the metal thin film; and 
 a receptor layer formed on a portion of the dielectric layer corresponding to the thin metal film exposed by the opening. 
 
     
     
       11. The hybrid waveguide sensor according to  claim 10 ,
 wherein the dielectric layer has a protrusion formed on the upper surface thereof, and the protrusion formed in one line at the optical signal input section as one end of the dielectric layer diverges into two lines at a predetermined position to thereby form first and second arms, the first arm being connected to the first optical signal output section and the second arm being connected to the third optical signal output section. 
 
     
     
       12. The hybrid waveguide sensor according to  claim 11 ,
 wherein the first arm of the protrusion passes over the thin metal film. 
 
     
     
       13. The hybrid waveguide sensor according to  claim 11 ,
 wherein the dielectric layer has another protrusion formed on the upper surface thereof so as to extend in a line from the second optical signal output section between the first and third optical signal output sections. 
 
     
     
       14. A hybrid waveguide sensor comprising:
 a dielectric layer having one optical signal input section formed in one end thereof and three of first to third optical signal output sections formed in the other end thereof, the dielectric layer having predetermined sizes of first and second thin metal films disposed therein so as to be spaced at a predetermined distance from each other; 
 a polymer layer formed on and under the dielectric layer and having first and second openings formed to expose portions of the dielectric layer corresponding to the first and second thin metal films, respectively, the first and second openings having a larger width than the first and second thin metal films; and 
 a receptor layer formed on a portion of the dielectric layer corresponding to the first thin metal film exposed by the first opening. 
 
     
     
       15. The hybrid waveguide sensor according to  claim 14 ,
 wherein the dielectric layer has a protrusion formed on the upper surface thereof, and the protrusion formed in one line at the optical signal input section as one end of the dielectric layer diverges into two lines at a predetermined position to thereby form first and second arms, the first arm being connected to the first optical signal output section and the second arm being connected to the third optical signal output section. 
 
     
     
       16. The hybrid waveguide sensor according to  claim 15 ,
 wherein the first arm of the protrusion passes over the first thin metal film, and the second arm of the protrusion passes over the second thin metal film. 
 
     
     
       17. The hybrid waveguide sensor according to  claim 15 ,
 wherein the dielectric layer has another protrusion formed on the upper surface thereof so as to extend in a line from the second optical signal output section between the first and third optical signal output sections. 
 
     
     
       18. A hybrid waveguide sensor comprising:
 a dielectric layer having one optical signal input section and one optical signal output section formed in one end thereof, the dielectric layer having a predetermined size of thin metal film provided therein; 
 a polymer layer formed on and under the dielectric layer and having an opening formed to expose a portion of the dielectric layer corresponding to the thin metal film, the opening having a larger width than the thin metal film; and 
 a receptor layer formed on a portion of the dielectric layer corresponding to the thin metal film exposed by the opening. 
 
     
     
       19. The hybrid waveguide sensor according to  claim 18 ,
 wherein the dielectric layer has two lines of protrusions formed on the upper surface thereof, the protrusions are separately formed in a line at the optical signal input section and the optical signal output section, respectively, which are formed in one end of the dielectric layer, two lines of the protrusions join each other at a predetermined position to thereby form one line, and the line diverges into two lines at a predetermined position so as to extend to the other end of the dielectric layer. 
 
     
     
       20. The hybrid waveguide sensor according to  claim 19 ,
 wherein the protrusion passes over the thin metal film. 
 
     
     
       21. The hybrid waveguide sensor according to  claim 19  further comprising
 a mirror surface provided on the other end of the dielectric layer. 
 
     
     
       22. The hybrid waveguide sensor according to  claim 18 ,
 wherein the dielectric layer has two lines of protrusions formed on the upper surface, and the protrusions are separately formed at the optical signal input section and the optical signal output section, respectively, which are formed in one end of the dielectric layer, the protrusions independently extending to the other end of the dielectric layer. 
 
     
     
       23. The hybrid waveguide sensor according to  claim 22 ,
 wherein the protrusion formed at the optical signal input section passes over the thin metal film. 
 
     
     
       24. The hybrid waveguide sensor according to  claim 22  further comprising
 a mirror surface provided on the other end of the dielectric layer.