Method for manufacturing liquid discharge head

Abstract

The present invention fixes a nozzle sheet on a substrate with a predetermined material ( 5,6 ), which has an excellent chemical resistance and sufficient adhesiveness, or more specifically, fixes the nozzle sheet on the substrate with cyclized rubber or with patternable, adhesive elastic material. Moreover, the present invention forms walls for liquid chambers and liquid channels with polyimide.

1. A manufacturing method for a liquid discharge head that is used for discharging droplets of liquid contained in liquid chambers from nozzles formed in a nozzle sheet by changing the pressure inside the liquid chambers via driving elements, the method comprising the steps of: forming walls structuring the liquid chambers and liquid channels for supplying the liquid to the liquid chambers and forming at least surfaces of the walls bonding the nozzle sheet with cyclized rubber having chemical resistance to the liquid and having sufficient adhesive strength to fix the nozzle sheet; and bonding the nozzle sheet to the walls; and wherein the walls are formed by stacking the cyclized rubber and a photosensitive resin, wherein the walls are formed by simultaneously patterning the photosensitive cyclized rubber and the resin by photolithography using activation energy. 
     
     
       2. A manufacturing method for a liquid discharge head that is used for discharging droplets of liquid contained in liquid chambers from nozzles formed in a nozzle sheet by changing the pressure inside the liquid chambers via driving elements, the method comprising the steps of: forming walls structuring the liquid chambers and liquid channels for supplying the liquid to the liquid chambers and farming at least surfaces of the walls bonding the nozzle sheet with cyclized rubber having chemical resistance to the liquid and having sufficient adhesive strength to fix the nozzle sheet; and bonding the nozzle sheet to the walls; and wherein the walls are formed by stacking the cyclized rubber and a photosensitive resin, wherein the walls are formed by simultaneously exposing the photosensitive cyclized rubber and the resin to activation energy and then individually or integrally developing the photosensitive cyclized rubber and the resin. 
     
     
       3. A manufacturing method for a liquid discharge head that is used for discharging droplets of liquid contained in liquid chambers from nozzles formed in a nozzle sheet by changing the pressure inside the liquid chambers via driving elements, the method comprising the steps of: forming walls structuring the liquid chambers and liquid channels for supplying the liquid to the liquid chambers and forming at least surfaces of the walls bonding the nozzle sheet with cyclized rubber having chemical resistance to the liquid and having sufficient adhesive strength to fix the nozzle sheet; and bonding the nozzle sheet to the walls; and wherein the walls are formed by stacking the cyclized rubber and a photosensitive resin, wherein the walls are formed by individually exposing the photosensitive cyclized rubber and the resin to activation energy and then individually or integrally developing the photosensitive cyclized rubber and the resin.