Apparatus and method for lapping slider using floating lapping head

Abstract

An apparatus for lapping a slider comprises a lapping head for supporting elements while pressing the elements against a rotating lapping plate, the elements that are to be formed into sliders, a holding mechanism for supporting the lapping head, the holding mechanism having a first engaging member that extends in a vertical direction, a base for supporting the holding mechanism, the base having a second engaging member that extends in the vertical direction, wherein the second engaging member is engaged with the first engaging member to form an internal space therebetween, and a decompressing mechanism for decompressing the internal space. The holding mechanism is subjected to vertically upward force from the decompressed internal space in order to be movably supported by the base in the vertical direction.

1. An apparatus for lapping a slider, comprising:
 a lapping head for supporting elements to be formed into sliders as said elements are pressed against a rotating lapping plate; 
 a holding mechanism for supporting said lapping head, said holding mechanism having a first engaging member that extends in a vertical direction; 
 a base for supporting said holding mechanism, said base having a second engaging member that extends in the vertical direction, wherein said second engaging member is engaged with said first engaging member to form an internal space therebetween; and 
 a decompressing mechanism for decompressing said internal space, thereby forming a decompressed internal space, 
 wherein said holding mechanism is subjected to vertically upward force from the decompressed internal space in order to be movably supported by said base in the vertical direction. 
 
   
   
     2. The apparatus according to  claim 1 , wherein said first engaging member is a cylinder provided in said holding mechanism, and said second engaging member is a piston provided in said base. 
   
   
     3. The apparatus according to  claim 1 , wherein said first engaging member is a piston provided in said holding mechanism, and said second engaging member is a cylinder provided in said base. 
   
   
     4. The apparatus according to  claim 1 , wherein
 said base includes a fixed frame member for supporting said lapping plate, and a guide member having said second engaging member, said guide member being movable in the vertical direction relative to said frame member, and 
 either said frame member or said guide member has a ball screw, and the other has a nut adapted to be engaged with said ball screw. 
 
   
   
     5. The apparatus according to  claim 4 , wherein
 said guide member has a first engaging section which extends in the vertical direction, and 
 said holding mechanism has a second engaging section which is engaged with said first engaging section and which only moves in the vertical direction relative to said guide member. 
 
   
   
     6. The apparatus according to  claim 1 , wherein
 said lapping head includes:
 a plurality of pushers which are provided at positions that correspond to said elements, respectively, said pushers being adapted to individually control pressing forces against said lapping plate; and 
 a pusher supporting section to support said pushers, said pusher supporting section being mounted fixedly at least in the vertical direction relative to said holding mechanism. 
 
 
   
   
     7. A method for lapping a slider, comprising the steps of:
 preparing a lapping apparatus which includes a lapping head for holding elements that are to be formed into sliders, a holding mechanism for supporting said lapping head, and a base for supporting said holding mechanism, wherein said holding mechanism has a first engaging member that extends in a vertical direction, said base has a second engaging member that extends in the vertical direction, wherein said second engaging member is engaged with said first engaging member to form an internal space therebetween; 
 holding said elements by means of said lapping head such that said elements face said lapping plate; and 
 lapping said elements by pressing said elements against the rotating lapping plate in a state in which said holding mechanism is supported movably in the vertical direction by said base, wherein said state is obtained by decompressing said internal space so that said holding mechanism is subjected to vertically upward force from the decompressed internal space. 
 
   
   
     8. The method according to  claim 7 , wherein the step of lapping includes simultaneously lapping said elements while individually controlling pressing forces against said lapping plate, said pressing forces being applied at positions that correspond to the respective elements. 
   
   
     9. The method according to  claim 8 , wherein the pressing forces are applied by pushers, and wherein controlling the pressing forces applied by said pushers includes controlling vertical strokes of said pushers. 
   
   
     10. The method according to  claim 7 , further comprising an element height forming lapping step to form a read element height of said element prior to the steps of holding said elements and lapping said elements,
 wherein the step of lapping said elements includes lapping resistance elements simultaneously with said elements that are to be formed into said sliders while monitoring electric resistance of said resistance elements, wherein said resistance elements are provided adjacent to said elements on a lapping surface. 
 
   
   
     11. The method according to  claim 10 , wherein the step of lapping said elements is completed when the electric resistance of said resistance elements reaches a target value of the electric resistance, said target value is predetermined based on a relationship between the lapping amount of said resistance element and the electric resistance thereof.