US7662732B2ExpiredUtilityA1

Method of preparing patterned carbon nanotube array and patterned carbon nanotube array prepared thereby

98
Assignee: SAMSUNG ELECTRONICS CO LTDPriority: May 26, 2006Filed: Dec 22, 2006Granted: Feb 16, 2010
Est. expiryMay 26, 2026(expired)· nominal 20-yr term from priority
D01F 9/12B82B 3/0061B82Y 10/00H01J 2329/00B82Y 30/00H01J 29/481C01B 32/168Y10S977/742H01J 2201/30469B82B 3/00
98
PatentIndex Score
80
Cited by
9
References
14
Claims

Abstract

A method of preparing a patterned carbon nanotube array a patterned carbon nanotube array prepared thereby are provided. The method includes forming carbon nanotubes in channels of porous templates, arranging the templates in a predetermined pattern on a substrate and selectively removing the templates to expose the carbon nanotubes.

Claims

exact text as granted — not AI-modified
1. A method of preparing a patterned carbon nanotube array, the method comprising:
 providing a plurality of porous templates, each of the porous templates including a plurality of hollow channels formed therein; 
 respectively forming carbon nanotubes in each of the plurality of hollow channels of the porous templates; 
 arranging the plurality of porous templates including the carbon nanotubes in a predetermined pattern on a surface of a substrate, wherein a longitudinal direction of the plurality of porous templates is disposed substantially parallel to the surface of the substrate; and 
 selectively removing the plurality of porous templates and exposing the carbon nanotubes on the substrate. 
 
     
     
       2. The method as set forth in  claim 1 , wherein forming the carbon nanotubes includes filling the hollow channels of the porous templates with the carbon nanotubes dispersed in a solvent using capillary action and removing only the solvent. 
     
     
       3. The method as set forth in  claim 1 , wherein forming carbon the nanotubes includes loading porous templates with a metal catalyst provided in the hollow channels thereof into a furnace and heating the porous templates while supplying a gas and a carbon nanotube source to directly grow the carbon nanotubes in the hollow channels. 
     
     
       4. The method as set forth in  claim 1 , wherein arranging the porous templates including the carbon nanotubes includes arranging an adjacent pair of the porous templates disposed separated from each other at a predetermined interval on the surface of the substrate. 
     
     
       5. The method as set forth in  claim 4 , wherein
 each of the porous templates includes an outer wall within which the carbon nanotubes are disposed, and 
 outer walls of the adjacent pair of the porous templates are disposed separated from each other at the predetermined interval on the surface of the substrate. 
 
     
     
       6. The method as set forth in  claim 1 , further comprising repeatedly alternating, one or more times:
 the arranging templates including carbon nanotubes, at a predetermined interval on the exposed carbon nanotubes, and 
 selectively removing the templates at the predetermined interval, 
 wherein multiple layers of the exposed carbon nanotubes are formed. 
 
     
     
       7. The method as set forth in  claim 6 , wherein the arranging the templates at the predetermined interval includes tilting the templates at the predetermined interval, at a predetermined angle to control an angle of the carbon nanotubes from the templates at the predetermined interval disposed on the exposed carbon nanotubes. 
     
     
       8. The method as set forth in  claim 1 , wherein the arranging the templates including carbon nanotubes includes weaving the templates. 
     
     
       9. The method as set forth in  claim 1 , wherein the porous template is formed of a material selected from the group consisting of glass, silica, and metal oxide, including TiO 2 , ZnO, SnO 2 , or WO 3 . 
     
     
       10. The method as set forth in  claim 1 , wherein the porous template has a diameter from 1 nm to 1 mm and a length from 50 nanometers (nm) to about 1 millimeter (mm). 
     
     
       11. The method as set forth in  claim 1 , wherein the hollow channels of the porous template have a diameter from about 1 nm to about 100 nm and an interval between the hollow channels is about 2 nm to about 1 micrometer (μm). 
     
     
       12. The method as set forth in  claim 1 , wherein the substrate includes one of glass, silica, a flexible polymer or a combination including at least one of the foregoing. 
     
     
       13. The method as set forth in  claim 1 , wherein selectively removing the porous templates includes one of wet etching, dry etching or pyrolysis or a combination including at least one of the foregoing. 
     
     
       14. The method as set forth in  claim 1 , wherein wet etching includes using an acid or a base.

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